公开(公告)号：US08183975B2

公开(公告)日：2012-05-22

申请号：US12564527

申请日：2009-09-22

申请人： Russell Craddock ,  James Anthony King

发明人： Russell Craddock ,  James Anthony King

IPC分类号： H01C10/10

CPC分类号： G01L9/0054 ,  G01L19/0069

摘要： A miniature pressure transducer is disclosed which is able to operate at high temperatures. The pressure transducer is provided on a substrate comprising an elongate silicon base portion with one or more contact areas formed at one end and a diaphragm formed at the opposite distal end. A plurality of piezoresistive elements are provided on the diaphragm, preferably in a Wheatstone Bridge arrangement, and connected to the contact areas using interconnects. The diaphragm extends across substantially the entire effective width of the elongate base portion providing a compact width while still maintaining a sensitive pressure sensing capability.

摘要翻译： 公开了能够在高温下操作的微型压力传感器。 压力传感器设置在基板上，该基板包括细长的硅基底部分，其一端形成一个或多个接触区域，而隔膜形成在相对的远端。 多个压阻元件设置在隔膜上，优选地在惠斯通电桥布置中，并且使用互连连接到接触区域。 膜片延伸穿过细长基部的整个有效宽度，提供紧凑的宽度，同时仍然保持敏感的压力感测能力。

公开(公告)号：USD331380S

公开(公告)日：1992-12-01

申请号：US518859

申请日：1990-05-04

申请人： Russell Craddock

设计人： Russell Craddock

公开(公告)号：US20070074578A1

公开(公告)日：2007-04-05

申请号：US11241049

申请日：2005-09-30

申请人： Kanakasabapathi Subramanian ,  Kuna Kishore ,  Parag Thakre ,  Russell Craddock ,  Peter Kinnell ,  John Greenwood

发明人： Kanakasabapathi Subramanian ,  Kuna Kishore ,  Parag Thakre ,  Russell Craddock ,  Peter Kinnell ,  John Greenwood

IPC分类号： G01L13/02

CPC分类号： G01L9/0019

摘要： A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.

摘要翻译： 提供差压感测系统。 感测系统包括膜层，其具有在其中径向延伸的通道，并且包括设置在通道中径向出入的一个或多个空腔，以及设置在通道中并被配置为以期望频率振荡的至少一个谐振束。 该系统还包括感测电路，其被配置为检测指示膜层变形的至少一个谐振光束的振荡。

公开(公告)号：US5355712A

公开(公告)日：1994-10-18

申请号：US758836

申请日：1991-09-13

申请人： Kurt Petersen ,  Farzad Pourahmadi ,  Russell Craddock

发明人： Kurt Petersen ,  Farzad Pourahmadi ,  Russell Craddock

IPC分类号： G01P21/00

CPC分类号： G01L9/0042 ,  G01L27/007 ,  G01P21/00

摘要： The present invention discloses a method and apparatus for testing the operational capability of flexure area equipped sensors especially those made of micromachined silicon. A thermal actuator beam is provided to bridge the structures which are joined by the flexure area. During the test, the beam's temperature is changed relative to that of the flexure area so as to provide a differential expansion or contraction. The result is that the flexure area bends and conventional bending sensors for the flexure area can sense the amount of bend. By comparing the actual amount of bend sensed with the amount expected from the temperature change applied to the beam, the operational capability can be determined.

摘要翻译： 本发明公开了一种用于测试装有挠曲区域的传感器，特别是由微加工硅制成的传感器的操作能力的方法和装置。 提供热致动器梁以桥接由弯曲区域连接的结构。 在测试期间，光束的温度相对于弯曲部分的温度改变，以便提供差别的膨胀或收缩。 结果是弯曲区域弯曲，弯曲区域的常规弯曲传感器可以感测弯曲量。 通过将感测到的实际弯曲量与应用于梁的温度变化的预期量进行比较，可以确定操作能力。

公开(公告)号：US20100073123A1

公开(公告)日：2010-03-25

申请号：US12564527

申请日：2009-09-22

申请人： Russell CRADDOCK ,  James Anthony King

发明人： Russell CRADDOCK ,  James Anthony King

IPC分类号： H01C10/10

CPC分类号： G01L9/0054 ,  G01L19/0069

摘要： A miniature pressure transducer is disclosed which is able to operate at high temperatures. The pressure transducer is provided on a substrate comprising an elongate silicon base portion with one or more contact areas formed at one end and a diaphragm formed at the opposite distal end. A plurality of piezoresistive elements are provided on the diaphragm, preferably in a Wheatstone Bridge arrangement, and connected to the contact areas using interconnects. The diaphragm extends across substantially the entire effective width of the elongate base portion providing a compact width whilst still maintaining a sensitive pressure sensing capability.

摘要翻译： 公开了能够在高温下操作的微型压力传感器。 压力传感器设置在基板上，该基板包括细长的硅基底部分，其一端形成一个或多个接触区域，而隔膜形成在相对的远端。 多个压阻元件设置在隔膜上，优选地在惠斯通电桥布置中，并且使用互连连接到接触区域。 膜片延伸穿过细长基部的整个有效宽度，提供紧凑的宽度，同时仍然保持敏感的压力感测能力。