System and method for sensing differential pressure
    1.
    发明申请
    System and method for sensing differential pressure 有权
    用于感应差压的系统和方法

    公开(公告)号:US20070074578A1

    公开(公告)日:2007-04-05

    申请号:US11241049

    申请日:2005-09-30

    IPC分类号: G01L13/02

    CPC分类号: G01L9/0019

    摘要: A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.

    摘要翻译: 提供差压感测系统。 感测系统包括膜层,其具有在其中径向延伸的通道,并且包括设置在通道中径向出入的一个或多个空腔,以及设置在通道中并被配置为以期望频率振荡的至少一个谐振束。 该系统还包括感测电路,其被配置为检测指示膜层变形的至少一个谐振光束的振荡。