发明申请
- 专利标题: System and method for sensing differential pressure
- 专利标题(中): 用于感应差压的系统和方法
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申请号: US11241049申请日: 2005-09-30
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公开(公告)号: US20070074578A1公开(公告)日: 2007-04-05
- 发明人: Kanakasabapathi Subramanian , Kuna Kishore , Parag Thakre , Russell Craddock , Peter Kinnell , John Greenwood
- 申请人: Kanakasabapathi Subramanian , Kuna Kishore , Parag Thakre , Russell Craddock , Peter Kinnell , John Greenwood
- 主分类号: G01L13/02
- IPC分类号: G01L13/02
摘要:
A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.
公开/授权文献
- US07490519B2 System and method for sensing differential pressure 公开/授权日:2009-02-17