Invention Application
- Patent Title: System and method for sensing differential pressure
- Patent Title (中): 用于感应差压的系统和方法
-
Application No.: US11241049Application Date: 2005-09-30
-
Publication No.: US20070074578A1Publication Date: 2007-04-05
- Inventor: Kanakasabapathi Subramanian , Kuna Kishore , Parag Thakre , Russell Craddock , Peter Kinnell , John Greenwood
- Applicant: Kanakasabapathi Subramanian , Kuna Kishore , Parag Thakre , Russell Craddock , Peter Kinnell , John Greenwood
- Main IPC: G01L13/02
- IPC: G01L13/02

Abstract:
A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.
Public/Granted literature
- US07490519B2 System and method for sensing differential pressure Public/Granted day:2009-02-17
Information query