Invention Application
US20070082275A1 Optical proximity correction photomasks 有权
光学接近校正光掩模

Optical proximity correction photomasks
Abstract:
An optical proximity correction photomask comprises a transparent substrate, a main feature having a first transmitivity disposed on the transparent substrate and at least one assist feature having a second transmitivity disposed beside the main feature and on the transparent substrate, wherein the first transmitivity is not equal to the second transmitivity.
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