发明申请
- 专利标题: Ferroelectric Capacitor with Parallel Resistance for Ferroelectric Memory
- 专利标题(中): 铁电存储器并联电阻的铁电电容器
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申请号: US11567873申请日: 2006-12-07
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公开(公告)号: US20070090461A1公开(公告)日: 2007-04-26
- 发明人: Jarrod Eliason , Glen Fox , Richard Bailey
- 申请人: Jarrod Eliason , Glen Fox , Richard Bailey
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 主分类号: H01L23/62
- IPC分类号: H01L23/62
摘要:
Ferroelectric memory cells (3) are presented, in which a cell resistor (R) is integrated into the cell capacitor (C) to inhibit charge accumulation or charge loss at the cell storage node (SN) when the cell (3) is not being accessed while avoiding significant disruption of memory cell access operations. Methods (100, 200) are provided for fabricating ferroelectric memory cells (3) and ferroelectric capacitors (C), in which a parallel resistance (R) is integrated in the capacitor ferroelectric material (20) or in an encapsulation layer (46) formed over the patterned capacitor structure (C).
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