发明申请
US20070090461A1 Ferroelectric Capacitor with Parallel Resistance for Ferroelectric Memory 有权
铁电存储器并联电阻的铁电电容器

Ferroelectric Capacitor with Parallel Resistance for Ferroelectric Memory
摘要:
Ferroelectric memory cells (3) are presented, in which a cell resistor (R) is integrated into the cell capacitor (C) to inhibit charge accumulation or charge loss at the cell storage node (SN) when the cell (3) is not being accessed while avoiding significant disruption of memory cell access operations. Methods (100, 200) are provided for fabricating ferroelectric memory cells (3) and ferroelectric capacitors (C), in which a parallel resistance (R) is integrated in the capacitor ferroelectric material (20) or in an encapsulation layer (46) formed over the patterned capacitor structure (C).
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