发明申请
- 专利标题: Methods for forming connection structures for microelectronic devices
- 专利标题(中): 用于形成微电子器件的连接结构的方法
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申请号: US11642570申请日: 2006-12-20
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公开(公告)号: US20070094874A1公开(公告)日: 2007-05-03
- 发明人: Belgacem Haba , Masud Beroz , David Tuckerman , Giles Humpston , Richard Crisp
- 申请人: Belgacem Haba , Masud Beroz , David Tuckerman , Giles Humpston , Richard Crisp
- 申请人地址: US CA San Jose
- 专利权人: Tessera, Inc.
- 当前专利权人: Tessera, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H05K1/11
- IPC分类号: H05K1/11
摘要:
Provided are connection structures for a microelectronic device and methods for forming the structure. A substrate is included having opposing surfaces and a plurality of holes extending through the surfaces. Also included is a plurality of electrically conductive posts. Each post extends from a base to a tip located within a corresponding hole of the substrate. An additional substrate may be provided such that the base of each post is located on a surface thereof. Additional electrically conductive posts may be provided having tips in corresponding holes of the additional substrate. Optionally, a dielectric material may be placed between the substrate and the posts.
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