Invention Application
- Patent Title: High fill ratio silicon spatial light modulator
- Patent Title (中): 高填充率硅空间光调制器
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Application No.: US11448149Application Date: 2006-06-05
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Publication No.: US20070097487A1Publication Date: 2007-05-03
- Inventor: Xiao Yang , Yuxiang Wang , Wook Ji , Justin Payne , Ye Wang , William Worley , Dongmin Chen , Howard Woo
- Applicant: Xiao Yang , Yuxiang Wang , Wook Ji , Justin Payne , Ye Wang , William Worley , Dongmin Chen , Howard Woo
- Applicant Address: US CA Sunnyvale 94089
- Assignee: Miradia Inc.
- Current Assignee: Miradia Inc.
- Current Assignee Address: US CA Sunnyvale 94089
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.
Public/Granted literature
- US07522330B2 High fill ratio silicon spatial light modulator Public/Granted day:2009-04-21
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