FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR
    4.
    发明申请
    FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 有权
    高比例硅太阳能光调制器的制造

    公开(公告)号:US20120171623A1

    公开(公告)日:2012-07-05

    申请号:US13418186

    申请日:2012-03-12

    CPC classification number: G02B26/0841

    Abstract: A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.

    Abstract translation: 一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。 上表面区域包括一个或多个图案化结构区域和至少一个开放区域,以暴露上表面区域的一部分以形成所得表面区域。 该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域,并且使用填充材料形成上部平坦化层。 该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

    Fabrication of a high fill ratio silicon spatial light modulator
    5.
    发明授权
    Fabrication of a high fill ratio silicon spatial light modulator 有权
    高填充率硅空间光调制器的制造

    公开(公告)号:US08159740B2

    公开(公告)日:2012-04-17

    申请号:US12690878

    申请日:2010-01-20

    CPC classification number: G02B26/0841

    Abstract: A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.

    Abstract translation: 一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。 上表面区域包括一个或多个图案化结构区域和至少一个开放区域,以暴露上表面区域的一部分以形成所得表面区域。 该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域,并且使用填充材料形成上部平坦化层。 该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

    MEMS MIRROR SYSTEM FOR LASER PRINTING APPLICATIONS
    6.
    发明申请
    MEMS MIRROR SYSTEM FOR LASER PRINTING APPLICATIONS 有权
    用于激光打印应用的MEMS镜面系统

    公开(公告)号:US20110111544A1

    公开(公告)日:2011-05-12

    申请号:US13009964

    申请日:2011-01-20

    CPC classification number: G02B26/0841 B41J2/471 G02B26/105

    Abstract: A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.

    Abstract translation: 用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底,以及提供可移动到衬底和电极上的反射镜。 施加到电极的电压产生静电力,导致反射镜的一端被吸引到基板。 可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。

    Micro-Electromechanical Devices Having Variable Capacitors Therein that Compensate for Temperature-Induced Frequency Drift in Acoustic Resonators
    7.
    发明申请
    Micro-Electromechanical Devices Having Variable Capacitors Therein that Compensate for Temperature-Induced Frequency Drift in Acoustic Resonators 有权
    具有可变电容器的微机电装置,用于补偿声谐振器中的温度感应频率漂移

    公开(公告)号:US20100194499A1

    公开(公告)日:2010-08-05

    申请号:US12404830

    申请日:2009-03-16

    CPC classification number: H03H9/172 H03H2009/241 Y10T29/42

    Abstract: Micro-electromechanical devices include a temperature-compensation capacitor and a thin-film bulk acoustic resonator having a first terminal electrically coupled to an electrode of the temperature-compensation capacitor. The temperature-compensation capacitor includes a bimorph beam having a first electrode thereon and a second electrode extending opposite the first electrode. This bimorph beam is configured to yield an increase in spacing between the first and second electrodes in response to an increase in temperature of the micro-electromechanical device. This increase in spacing between the first and second electrodes leads to a decrease in capacitance of the temperature-compensation capacitor. Advantageously, this decrease in capacitance can be used to counteract a negative temperature coefficient of frequency associated with the thin-film bulk acoustic resonator, and thereby render the resonant frequency of the micro-electromechanical device more stable in response to temperature fluctuations.

    Abstract translation: 微机电装置包括温度补偿电容器和具有电耦合到温度补偿电容器的电极的第一端子的薄膜体声波谐振器。 温度补偿电容器包括其上具有第一电极的双压电晶片和与第一电极相对延伸的第二电极。 该双压电晶片梁被配置为响应于微机电装置的温度升高而产生第一和第二电极之间的间隔的增加。 这种第一和第二电极之间的间隔增加导致温度补偿电容器的电容降低。 有利地,电容的这种减小可以用于抵消与薄膜体声波谐振器相关联的频率的负温度系数,从而使得微机电装置的谐振频率响应于温度波动而更加稳定。

    Projection display system including a high fill ratio silicon spatial light modulator
    8.
    发明授权
    Projection display system including a high fill ratio silicon spatial light modulator 有权
    投影显示系统包括高填充率硅空间光调制器

    公开(公告)号:US07453624B2

    公开(公告)日:2008-11-18

    申请号:US11448537

    申请日:2006-06-05

    CPC classification number: G02B26/0841

    Abstract: A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.

    Abstract translation: 显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。 显示系统还包括位于照明路径中的空间光调制器。 空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。 铰链结构包括硅材料。 空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。 显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

    Perception-Aware Low-Power Audio Decoder For Portable Devices
    9.
    发明申请
    Perception-Aware Low-Power Audio Decoder For Portable Devices 有权
    感知到便携式设备的低功耗音频解码器

    公开(公告)号:US20070299672A1

    公开(公告)日:2007-12-27

    申请号:US11792019

    申请日:2005-11-28

    CPC classification number: G10L19/24

    Abstract: A method of decoding audio data representing an audio clip, said method comprising the steps of selecting one of a predetermined number of frequency bands; decoding a portion of the audio data representing said audio clip according to the selected frequency band, wherein a remaining portion of the audio data representing said audio clip is discarded; and converting the decoded portion of audio data into sample data representing the decoded audio data.

    Abstract translation: 一种解码表示音频剪辑的音频数据的方法,所述方法包括以下步骤:选择预定数量的频带之一; 根据所选择的频带解码表示所述音频剪辑的音频数据的一部分,其中表示所述音频剪辑的音频数据的剩余部分被丢弃; 并将音频数据的解码部分转换成表示解码音频数据的样本数据。

    High fill ratio silicon spatial light modulator
    10.
    发明申请
    High fill ratio silicon spatial light modulator 有权
    高填充率硅空间光调制器

    公开(公告)号:US20070097487A1

    公开(公告)日:2007-05-03

    申请号:US11448149

    申请日:2006-06-05

    CPC classification number: G02B26/0841 G02B26/008

    Abstract: An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.

    Abstract translation: 一种用于显示器应用的光学偏转装置。 光偏转装置包括:半导体衬底,包括上表面区域和设置在上表面区域上的一个或多个电极器件。 光学偏转装置还包括铰链装置,其包括硅材料并且连接到上表面区域。 光学偏转装置还包括限定在上表面区域和铰链装置之间的间隔,以及反射镜结构,其包括联接到铰链装置的柱部分和耦合到柱部分并且覆盖铰链装置的镜板部分。

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