发明申请
- 专利标题: METHOD OF MANUFACTURING SILICON SINGLE CRYSTAL, SILICON SINGLE CRYSTAL AND SILICON WAFER
- 专利标题(中): 硅单晶,硅单晶和硅晶体的制造方法
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申请号: US11620024申请日: 2007-01-04
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公开(公告)号: US20070101926A1公开(公告)日: 2007-05-10
- 发明人: Izumi FUSEGAWA , Sadayuki Okuni , Nobuaki Mitamura , Tomohiko Ohta , Nobuo Katuoka
- 申请人: Izumi FUSEGAWA , Sadayuki Okuni , Nobuaki Mitamura , Tomohiko Ohta , Nobuo Katuoka
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2002-122250 20020424
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04
摘要:
The present invention is a method of manufacturing a silicon single crystal by Czochralski method without performing Dash Necking method, comprising the steps of: providing a seed crystal having a tip end with a sharp-pointed shape or a truncation thereof in which an angle of the tip end is 28° or less; keeping the tip end of the seed crystal at just above a silicon melt to heat it before bringing the tip end of the seed crystal into contact with the silicon melt; bringing the tip end of the seed crystal into contact with the silicon melt and immersing the seed crystal into the silicon melt to a desired diameter; and shifting to pull the single crystal, wherein a temperature variation at a surface of the silicon melt is kept at ±5° C. or less at least for a period from a point of bringing the tip end of the seed crystal into contact with the silicon melt to a point of shifting to pull the single crystal. Thereby, in a method of growing a silicon single crystal by Czochralski method without using Dash Necking method, a success ratio of growing a single crystal free from dislocation can be increased, at the same time a heavy silicon single crystal having a large diameter in which a diameter of a constant diameter portion is over 200 mm can be grown even in the case of growing a silicon single crystal having a crystal orientation of .
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