发明申请
- 专利标题: SRAM CELL
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申请号: US11164218申请日: 2005-11-15
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公开(公告)号: US20070108528A1公开(公告)日: 2007-05-17
- 发明人: Brent Anderson , Edward Nowak
- 申请人: Brent Anderson , Edward Nowak
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
Disclosed is an SRAM cell on an SOI, bulk or HOT wafer with two pass-gate n-FETs, two pull-up p-FETs and two pull-down n-FETs and the associated methods of making the SRAM cell. The pass-gate FETs and pull-down FETs are non-planar fully depleted finFETs or trigate FETs. The pull-down FETs comprise non-planar partially depleted three-gated FETs having a greater channel width and a greater gate length and, thus, a greater drive current relative to the pass-gate and pull-up FETs. Additionally, for optimal electron mobility and hole mobility, respectively, the channels of the n-FETs and p-FETs can comprise semiconductors with different crystalline orientations.
公开/授权文献
- US07547947B2 SRAM cell 公开/授权日:2009-06-16
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