发明申请
- 专利标题: Interposer and method for producing the same and electronic device
- 专利标题(中): 内插件及其制造方法及电子装置
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申请号: US11505899申请日: 2006-08-18
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公开(公告)号: US20070108591A1公开(公告)日: 2007-05-17
- 发明人: Masahiro Sunohara , Yuichi Taguchi
- 申请人: Masahiro Sunohara , Yuichi Taguchi
- 专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.
- 优先权: JPP.2005-239776 20050822
- 主分类号: H01L23/12
- IPC分类号: H01L23/12
摘要:
An interposer includes a substrate made of an inorganic material; a through wiring including conductors embedded in through holes; and an upper wiring and (or)a lower wiring. The through wiring, the upper wiring and the lower wiring are respectively formed on preliminary wiring patterns that are additionally simultaneously or sequentially formed on layers made of an insulating material applied to at least wiring forming parts of the substrate, and are formed with a metal mold itself used for forming the preliminary wiring patterns or layers made of a wiring material applied by a printing operation, a plating operation or a deposition on the preliminary wiring patterns formed on the layers of the insulating material by transferring a fine structure pattern of the metal mold.
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