发明申请
- 专利标题: Semiconductor Assembly Having Substrate with Electroplated Contact Pads
- 专利标题(中): 具有电镀接触垫基板的半导体组件
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申请号: US11620134申请日: 2007-01-05
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公开(公告)号: US20070111516A1公开(公告)日: 2007-05-17
- 发明人: Donald Abbott
- 申请人: Donald Abbott
- 申请人地址: US TX Dallas 75265
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas 75265
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763 ; H01L23/48
摘要:
An apparatus comprising an insulating substrate having first and second surfaces and a plurality of metal-filled vias extending from the first to the second surface. The first and second surfaces have contact pads, each one comprising a connector stack to at least one of the vias. The stack comprises a seed metal layer in contact with the via metal capable of providing an adhesive and conductive layer for electroplating on its surface, a first electroplated support layer secured to the seed metal layer, a second electroplated support layer, and at least one reflow metal bonding layer on the second support layer. The electrolytic plating process produces support layers substantially pure (at least 99.0%), free of unwanted additives such as phosphorus or boron, and exhibiting closely controlled grain sizes. Reflow metal connectors provide attachment to chip contact pads and external parts.
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