Invention Application
- Patent Title: LOW COST BONDING PAD AND METHOD OF FABRICATING SAME
- Patent Title (中): 低成本接合垫及其制造方法
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Application No.: US11164653Application Date: 2005-11-30
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Publication No.: US20070120216A1Publication Date: 2007-05-31
- Inventor: Jeffrey Brigante , Zhong-Xiang He , Barbara Waterhouse , Eric White
- Applicant: Jeffrey Brigante , Zhong-Xiang He , Barbara Waterhouse , Eric White
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L21/44

Abstract:
A structure and a method of forming the structure. The structure including: an integrated circuit chip having a set of wiring levels from a first wiring level to a last wiring level, each wiring level including one or more damascene, dual-damascene wires or damascene vias embedded in corresponding interlevel dielectric levels, a top surface of a last damascene or dual-damascene wire of the last wiring level substantially coplanar with a top surface of a corresponding last interlevel dielectric level; a capping layer in direct physical and electrical contact with a top surface of the last damascene or dual-damascene wire, the last damascene or dual-damascene wire comprising copper; a dielectric passivation layer formed on a top surface of the last interlevel dielectric level; and an aluminum pad in direct physical and electrical contact with the capping layer, a top surface of the aluminum pad not covered by the dielectric passivation layer.
Public/Granted literature
- US07245025B2 Low cost bonding pad and method of fabricating same Public/Granted day:2007-07-17
Information query
IPC分类: