发明申请
US20070125995A1 Horizontal emitting, vertical emitting, beam shaped, distributed feedback (DFB) lasers fabricated by growth over a patterned substrate with multiple overgrowth
有权
水平发射,垂直发射,束形,分布反馈(DFB)激光器,通过在具有多个过度生长的图案化衬底上生长制成
- 专利标题: Horizontal emitting, vertical emitting, beam shaped, distributed feedback (DFB) lasers fabricated by growth over a patterned substrate with multiple overgrowth
- 专利标题(中): 水平发射,垂直发射,束形,分布反馈(DFB)激光器,通过在具有多个过度生长的图案化衬底上生长制成
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申请号: US11633148申请日: 2006-12-04
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公开(公告)号: US20070125995A1公开(公告)日: 2007-06-07
- 发明人: Claude Weisbuch , Shuji Nakamura
- 申请人: Claude Weisbuch , Shuji Nakamura
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L27/15
摘要:
A structure using integrated optical elements is comprised of a substrate, a buffer layer grown on the substrate, one or more first patterned layers deposited on top of the buffer layer, wherein each of the first patterned layers is comprised of a bottom lateral epitaxial overgrowth (LEO) mask layer and a LEO nitride layer filling holes in the bottom LEO mask layer, one or more active layers formed on the first patterned layers, and one or more second patterned layers deposited on top of the active layer, wherein each of the second patterned layers is comprised of a top LEO mask layer and a LEO nitride layer filling holes in the top LEO mask layer, wherein the top and/or bottom LEO mask layers act as a mirror, optical confinement layer, grating, wavelength selective element, beam shaping element or beam directing element for the active layers.
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