Invention Application
- Patent Title: SURFACE ACOUSTIC WAVE PRESSURE SENSORS
- Patent Title (中): 表面声波式压力传感器
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Application No.: US11164845Application Date: 2005-12-07
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Publication No.: US20070126072A1Publication Date: 2007-06-07
- Inventor: Cornel Cobianu , Ioan Pavelescu , Viorel Avramescu , James Cook , Leonard McNally
- Applicant: Cornel Cobianu , Ioan Pavelescu , Viorel Avramescu , James Cook , Leonard McNally
- Applicant Address: US NJ Morristown
- Assignee: HONEYWELL INTERNATIONAL INC.
- Current Assignee: HONEYWELL INTERNATIONAL INC.
- Current Assignee Address: US NJ Morristown
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/00

Abstract:
Improved SAW pressure sensors and manufacturing methods thereof. A SAW wafer including a number of SAW transducers disposed thereon may be provided. A cover wafer may also be provided, with a glass wall situated between the cover wafer and the SAW wafer. The cover wafer may be secured to the SAW wafer such that the glass wall surrounds the SAW transducers. In some instances, the glass wall may define, at least in part, a separation between the cover wafer and the SAW wafer. One or more contours may also be provided between the cover wafer and the SAW wafer such that at least one of the contours surrounds at least one of the SAW transducers when the cover wafer is disposed over and secured relative to the SAW wafer.
Public/Granted literature
- US07651879B2 Surface acoustic wave pressure sensors Public/Granted day:2010-01-26
Information query
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