公开(公告)号：US20070126072A1

公开(公告)日：2007-06-07

申请号：US11164845

申请日：2005-12-07

申请人： Cornel Cobianu ,  Ioan Pavelescu ,  Viorel Avramescu ,  James Cook ,  Leonard McNally

发明人： Cornel Cobianu ,  Ioan Pavelescu ,  Viorel Avramescu ,  James Cook ,  Leonard McNally

IPC分类号： H01L29/84 ,  H01L21/00

CPC分类号： G01L9/0025 ,  Y10T29/49005 ,  Y10T29/4902 ,  Y10T29/4908

摘要： Improved SAW pressure sensors and manufacturing methods thereof. A SAW wafer including a number of SAW transducers disposed thereon may be provided. A cover wafer may also be provided, with a glass wall situated between the cover wafer and the SAW wafer. The cover wafer may be secured to the SAW wafer such that the glass wall surrounds the SAW transducers. In some instances, the glass wall may define, at least in part, a separation between the cover wafer and the SAW wafer. One or more contours may also be provided between the cover wafer and the SAW wafer such that at least one of the contours surrounds at least one of the SAW transducers when the cover wafer is disposed over and secured relative to the SAW wafer.

摘要翻译： 改进的SAW压力传感器及其制造方法。 可以提供包括设置在其上的多个SAW换能器的SAW晶片。 还可以提供覆盖晶片，其中玻璃壁位于盖晶片和SAW晶片之间。 覆盖晶片可以固定到SAW晶片，使得玻璃壁围绕SAW换能器。 在一些情况下，玻璃壁可以至少部分地限定覆盖晶片和SAW晶片之间的间隔。 也可以在盖晶片和SAW晶片之间提供一个或多个轮廓，使得当盖晶片相对于SAW晶片设置在上方并且被固定时，轮廓中的至少一个围绕至少一个SAW换能器。

公开(公告)号：US20060086188A1

公开(公告)日：2006-04-27

申请号：US10971140

申请日：2004-10-21

申请人： Viorel Avramescu ,  Cornel Cobianu ,  Ioan Pavelescu

发明人： Viorel Avramescu ,  Cornel Cobianu ,  Ioan Pavelescu

IPC分类号： B23P17/04 ,  G01R3/00

CPC分类号： G01L9/0025 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/15151 ,  H01L2924/181 ,  H01L2924/1815 ,  Y10T29/49 ,  Y10T29/49007 ,  H01L2924/00014 ,  H01L2924/00012

摘要： A vacuum sealed SAW pressure sensor is disclosed herein, which includes a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line) supported by a thin diaphragm. The substrate material can be implemented as a quartz wafer (i.e., a “base” wafer). The SAW device can be configured on one side of the wafer and the diaphragm etched on the opposite side. A quartz micromachined pressure sensor can thus be realized, which operates based on a variation of the surface wave velocity of a SAW device situated on the thin diaphragm. The SAW sensor is generally sealed in a vacuum and diaphragm sustains the sensor, thereby implementing a sensor on a wafer scale while allowing for a cost reduction per chip.

摘要翻译： 本文公开了一种真空密封的SAW压力传感器，其包括被配置为由薄隔膜支撑的SAW器件（例如，SAW谐振器或SAW延迟线）的感测元件。 衬底材料可以实现为石英晶片（即，“基底”晶片）。 SAW器件可以配置在晶片的一侧，并且隔膜在相对侧蚀刻。 因此可以实现基于位于薄隔膜上的SAW器件的表面波速度的变化而操作的石英微加工压力传感器。 SAW传感器通常在真空中密封并且隔膜维持传感器，从而在晶片秤上实现传感器，同时允许每个芯片的成本降低。

公开(公告)号：US20070164859A1

公开(公告)日：2007-07-19

申请号：US11331722

申请日：2006-01-13

申请人： Cornel Cobianu ,  Ion Georgescu ,  James Cook ,  Viorel Avramescu

发明人： Cornel Cobianu ,  Ion Georgescu ,  James Cook ,  Viorel Avramescu

IPC分类号： G08B1/08 ,  G08B13/14

CPC分类号： G06K19/0723 ,  G06K19/0716

摘要： A multifunctional multichip system can operate in a passive mode by using at least one antenna to receive electromagnetic energy and using that energy to perform system functions. The system includes a sensor, an impedance matching circuit and an RFID module. The sensor produces a sensor signal containing a measurement. The RFID can produce an identification signal containing identification information. Alternatively, the RFID chip can be used in an addressing mode wherein the system only produces a signal in response to an addressing signal containing addressing information. The addressing signal is received from the electromagnetic field. In either mode, the sensor signal is coupled from the antenna into the electromagnetic field from which a receiver can obtain it. The signal can contain the identification information as well as the measurement. A matching network minimizes the effects of impedance mismatches between the system elements.

摘要翻译： 多功能多芯片系统可以通过使用至少一个天线来接收电磁能并使用该能量来执行系统功能，以无源模式操作。 该系统包括传感器，阻抗匹配电路和RFID模块。 传感器产生包含测量值的传感器信号。 RFID可以产生包含识别信息的识别信号。 或者，RFID芯片可以以寻址模式使用，其中系统仅响应于包含寻址信息的寻址信号产生信号。 从电磁场接收寻址信号。 在任一模式中，传感器信号从天线耦合到电磁场中，接收器可从该电磁场获得它。 该信号可以包含识别信息以及测量。 匹配网络可以最大限度地减少系统元件之间阻抗失配的影响。

公开(公告)号：US20060075820A1

公开(公告)日：2006-04-13

申请号：US10964519

申请日：2004-10-13

申请人： Cornel Cobianu ,  Ioan Pavelescu ,  James Cook

发明人： Cornel Cobianu ,  Ioan Pavelescu ,  James Cook

IPC分类号： G01L11/00

CPC分类号： G01L9/0025

摘要： Devices and methods for acoustically measuring temperature and pressure are disclosed. A SAW sensor in accordance with an illustrative embodiment can include an electrode structure adapted to transmit and receive surface acoustic waves along a SAW delay line, temperature sensing means for measuring temperature along a first direction of the SAW delay line, and pressure sensing means for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna adapted to wirelessly transmit and receive RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.

摘要翻译： 公开了用于声学测量温度和压力的装置和方法。 根据说明性实施例的SAW传感器可以包括适于沿着SAW延迟线发送和接收表面声波的电极结构，用于沿SAW延迟线的第一方向测量温度的温度感测装置，以及用于测量 沿着SAW延迟线的第二方向施加压力。 SAW传感器可以包括适于无线地向能够用于为SAW传感器供电的电询问器单元的RF信号发送和接收RF信号的天线。

公开(公告)号：US20050231067A1

公开(公告)日：2005-10-20

申请号：US10828142

申请日：2004-04-20

申请人： James Cook ,  Cornel Cobianu ,  Vlad Buiculescu ,  Ioan Pavelescu ,  Brian Speldrich ,  James Liu ,  Brian Marsh

发明人： James Cook ,  Cornel Cobianu ,  Vlad Buiculescu ,  Ioan Pavelescu ,  Brian Speldrich ,  James Liu ,  Brian Marsh

IPC分类号： G01L9/00 ,  H02N2/00

CPC分类号： G01L9/0025 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/4913

摘要： A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.

摘要翻译： 公开了一种石英传感器方法和系统，其中可以机械地模拟多个SAW感测谐振器以在石英晶片衬底上实现。 此后可以适当地蚀刻石英晶片衬底，以从石英晶片衬底产生石英膜。 然后可以将多个SAW感测谐振器（例如，压力，参考和/或温度的SAW谐振器）定位在石英晶片衬底上，其基于在衬底上的先前机械模拟实现，从而从衬底上产生石英传感器封装， 石英晶片基板。

公开(公告)号：US09437933B2

公开(公告)日：2016-09-06

申请号：US12755123

申请日：2010-04-06

申请人： Ion Georgescu ,  Dana E. Guran ,  Ioan Pavelescu ,  Cornel Cobianu

发明人： Ion Georgescu ,  Dana E. Guran ,  Ioan Pavelescu ,  Cornel Cobianu

IPC分类号： H01Q11/08 ,  H01Q1/38 ,  H01Q1/32

CPC分类号： H01Q11/08 ,  H01Q1/3233 ,  H01Q1/38

摘要： An apparatus includes a sensor that receives a first electrical signal and provides a second electrical signal in response to the first electrical signal. The second electrical signal is based on at least one parameter monitored by the sensor. The apparatus also includes an antenna that converts first wireless signals into the first electrical signal and that converts the second electrical signal into second wireless signals. The antenna includes a substrate, conductive traces, and conductive interconnects. The conductive traces are formed on first and second surfaces of the substrate. The conductive interconnects couple the conductive traces, and the conductive interconnects and the conductive traces form at least one helical arm of the antenna. The conductive traces could be formed in various ways, such as by etching or direct printing. The conductive interconnects could also be formed in various ways, such as by filling vias in the substrate or direct printing.

摘要翻译： 一种装置包括传感器，其接收第一电信号并响应于第一电信号提供第二电信号。 第二电信号基于由传感器监测的至少一个参数。 该装置还包括天线，其将第一无线信号转换成第一电信号并将第二电信号转换成第二无线信号。 天线包括基板，导电迹线和导电互连。 导电迹线形成在基板的第一和第二表面上。 导电互连件耦合导电迹线，并且导电互连和导电迹线形成天线的至少一个螺旋臂。 导电迹线可以以各种方式形成，例如通过蚀刻或直接印刷。 导电互连也可以以各种方式形成，例如通过在基板中填充通孔或直接印刷。

公开(公告)号：US20110241959A1

公开(公告)日：2011-10-06

申请号：US12755123

申请日：2010-04-06

申请人： Ion Georgescu ,  Dana E. Guran ,  Ioan Pavelescu ,  Cornel Cobianu

发明人： Ion Georgescu ,  Dana E. Guran ,  Ioan Pavelescu ,  Cornel Cobianu

IPC分类号： H01Q1/36 ,  H01Q9/16 ,  H01B13/00

CPC分类号： H01Q11/08 ,  H01Q1/3233 ,  H01Q1/38

摘要： An apparatus includes a sensor that receives a first electrical signal and provides a second electrical signal in response to the first electrical signal. The second electrical signal is based on at least one parameter monitored by the sensor. The apparatus also includes an antenna that converts first wireless signals into the first electrical signal and that converts the second electrical signal into second wireless signals. The antenna includes a substrate, conductive traces, and conductive interconnects. The conductive traces are formed on first and second surfaces of the substrate. The conductive interconnects couple the conductive traces, and the conductive interconnects and the conductive traces form at least one helical arm of the antenna. The conductive traces could be formed in various ways, such as by etching or direct printing. The conductive interconnects could also be formed in various ways, such as by filling vias in the substrate or direct printing.

摘要翻译： 一种装置包括传感器，其接收第一电信号并响应于第一电信号提供第二电信号。 第二电信号基于由传感器监测的至少一个参数。 该装置还包括天线，其将第一无线信号转换成第一电信号并将第二电信号转换成第二无线信号。 天线包括基板，导电迹线和导电互连。 导电迹线形成在基板的第一和第二表面上。 导电互连件耦合导电迹线，并且导电互连和导电迹线形成天线的至少一个螺旋臂。 导电迹线可以以各种方式形成，例如通过蚀刻或直接印刷。 导电互连也可以以各种方式形成，例如通过在基板中填充通孔或直接印刷。

公开(公告)号：US08479590B2

公开(公告)日：2013-07-09

申请号：US12949113

申请日：2010-11-18

申请人： Cornel Cobianu ,  Frank Turnbull ,  Ion Georgescu ,  Viorel Avramescu

发明人： Cornel Cobianu ,  Frank Turnbull ,  Ion Georgescu ,  Viorel Avramescu

IPC分类号： G01N29/04 ,  G01N3/00

CPC分类号： G01N29/2462 ,  G01N29/223 ,  G01N2291/0232 ,  G01N2291/2634

摘要： A system for detection of stress and deformation in a structural asset, for instance, one of reinforced concrete. An area on the asset may have a structure interface, such as a patch, attached to it with a fastening mechanism which may be a layer of an epoxy or other material, or be items such as screws, bolts, welds, or the like. One or more surface acoustic wave (SAW) strain sensors may be attached to the interface with an adhesive layer of epoxy or other material, or with mechanical items. Stress may be transmitted by the interface to the strain sensors. The sensors may be interrogated with a wire or wireless reader to obtain strain measurements. The measurements may indicate stress and deformations such as bulges and breaks in the asset. The measurements may also be a basis for determining location and extent of the stress and deformations.

摘要翻译： 一种用于检测结构资产中的应力和变形的系统，例如钢筋混凝土之一。 资产上的区域可以具有附接到其上的结构界面，例如贴片，其具有可以是环氧树脂或其它材料层的紧固机构，或者诸如螺钉，螺栓，焊接等的物品。 一个或多个表面声波（SAW）应变传感器可以与环氧树脂或其它材料或机械物品的粘合剂层附接到界面。 应力可以通过接口传递到应变传感器。 传感器可以用线或无线读取器询问以获得应变测量值。 测量结果可能表示压力和变形，如资产中的凸起和断裂。 测量也可能是确定应力和变形的位置和程度的基础。

公开(公告)号：US07891252B2

公开(公告)日：2011-02-22

申请号：US12362741

申请日：2009-01-30

申请人： Cornel Cobianu ,  Viorel Avramescu ,  Ion Georgescu ,  Stefan-Dan Costea

发明人： Cornel Cobianu ,  Viorel Avramescu ,  Ion Georgescu ,  Stefan-Dan Costea

IPC分类号： G01L7/00

CPC分类号： G01L9/0025 ,  B60C23/0408 ,  C03C27/00 ,  H01L41/1132 ,  H01L41/331 ,  Y10T29/42

摘要： A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate.

摘要翻译： 一种方法包括在第一晶片中形成多个沟槽，在第二晶片的第一表面上形成传感器结构，以及结合第一晶片和第二晶片。 该方法还包括蚀刻第二晶片的第二表面以在第二晶片中形成传感器膜片。 该方法还包括通过在与沟槽相关联的第一晶片的多个区域中切割第一晶片来去除第一晶片的一部分。 传感器包括在基板的第一表面上的基板和表面声波（SAW）谐振器。 传感器还包括电耦合到SAW谐振器的接合焊盘和形成在衬底的第二表面中的凹口。 传感器还包括通过间隔件与衬底的第一表面分离的盖。 SAW谐振器位于盖和基板之间。

公开(公告)号：US20100141087A1

公开(公告)日：2010-06-10

申请号：US12332064

申请日：2008-12-10

申请人： Cazimir Bostan ,  Stefan Dan Costea ,  Viorel Avramescu ,  Cornel Cobianu

发明人： Cazimir Bostan ,  Stefan Dan Costea ,  Viorel Avramescu ,  Cornel Cobianu

IPC分类号： H01L41/047

CPC分类号： G01N29/245 ,  H01L2924/0002 ,  H01L2924/00

摘要： A SAW based sensor apparatus utilizing semi-synchronous SAW resonator having a single resonance at Bragg frequency with very high quality factor is disclosed. The semi-synchronous SAW resonator includes at least one inter-digital transducer, which generates and receives surface acoustic wave and a number of grating reflectors, which reflect the surface acoustic wave and generate a standing wave between the reflectors, The interdigital transducer and the grating reflectors can be fabricated on a substrate (e.g., quartz) by photolithographic process. The resonance condition is independent of transducer directivity and reflection coefficient per finger. Such a SAW based sensor apparatus having three semi-synchronous SAW resonators can be utilized for measuring pressure and temperature for a wireless tire-pressure monitoring system.

摘要翻译： 公开了一种利用具有非常高品质因数的布拉格频率具有单个谐振的半同步SAW谐振器的基于SAW的传感器装置。 半同步SAW谐振器包括至少一个数字间换能器，其产生和接收表面声波和多个反射表面声波并在反射器之间产生驻波的光栅反射器。叉指式换能器和光栅 可以通过光刻工艺在基板（例如石英）上制造反射器。 谐振条件与传感器方向性和每个手指的反射系数无关。 具有三个半同步SAW谐振器的这种基于SAW的传感器装置可用于测量无线轮胎压力监测系统的压力和温度。