Invention Application
US20070128526A1 Non-collinear end-to-end structures with sub-resolution assist features
失效
具有次分辨率辅助功能的非共线端对端结构
- Patent Title: Non-collinear end-to-end structures with sub-resolution assist features
- Patent Title (中): 具有次分辨率辅助功能的非共线端对端结构
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Application No.: US11297209Application Date: 2005-12-07
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Publication No.: US20070128526A1Publication Date: 2007-06-07
- Inventor: Charles Wallace , Shannon Daviess , Swaminathan Sivakumar
- Applicant: Charles Wallace , Shannon Daviess , Swaminathan Sivakumar
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00

Abstract:
Sub-resolution assist features for non-collinear features are described for use in photolithography. A photolithography mask with elongated features is synthesized. An end-to-end gap between two features if found for which the ends of the two features facing the gap are linearly offset from one another. A sub-resolution assist feature is applied to the end-to-end gap between the elongated features, and the synthesized photolithography mask is modified to include the sub-resolution assist feature.
Public/Granted literature
- US07572557B2 Non-collinear end-to-end structures with sub-resolution assist features Public/Granted day:2009-08-11
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