发明申请
- 专利标题: Method for manufacturing single crystal semiconductor
- 专利标题(中): 单晶半导体制造方法
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申请号: US10588750申请日: 2005-02-18
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公开(公告)号: US20070131158A1公开(公告)日: 2007-06-14
- 发明人: Masafumi Ura , Hidetoshi Kurogi , Toshiharu Yubitani , Noboru Furuichi
- 申请人: Masafumi Ura , Hidetoshi Kurogi , Toshiharu Yubitani , Noboru Furuichi
- 申请人地址: JP Kanagawa 254-0014
- 专利权人: KOMATSU DENSHI KINZOKU KABUSHIKI KAISHA
- 当前专利权人: KOMATSU DENSHI KINZOKU KABUSHIKI KAISHA
- 当前专利权人地址: JP Kanagawa 254-0014
- 优先权: JP2004-043211 20040219
- 国际申请: PCT/JP05/02627 WO 20050218
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B19/00 ; C30B21/06
摘要:
The method for manufacturing a single crystal semiconductor achieves an object to reduce the impurity concentration nonuniformity within a semiconductor wafer plane and thus to improve the wafer planarity by introducing an impurity into the single crystal semiconductor more uniformly during the pulling of the single crystal semiconductor from a melt. In the course of pulling the single crystal semiconductor (6), the rotating velocity (ω2) of the single crystal semiconductor (6) being pulled is adjusted to a predetermined value or higher, and a magnetic field having a strength in a predetermined range is applied to the melt (5). Particularly, the crystal peripheral velocity is adjusted to 0.126 m/sec or higher, and M/V1/3 is adjusted to 35.5≦M/V1/3≦61.3. More desirably, the crystal peripheral velocity is adjusted to 0.141 m/sec or higher, and M/V1/3 is adjusted to 40.3≦M/V1/3≦56.4.
公开/授权文献
- US07374614B2 Method for manufacturing single crystal semiconductor 公开/授权日:2008-05-20
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