发明申请
- 专利标题: SOI active layer with different surface orientation
- 专利标题(中): 具有不同表面取向的SOI活性层
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申请号: US11302770申请日: 2005-12-14
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公开(公告)号: US20070134891A1公开(公告)日: 2007-06-14
- 发明人: Olubunmi Adetutu , Robert Jones , Ted White
- 申请人: Olubunmi Adetutu , Robert Jones , Ted White
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A wafer having an SOI configuration and active regions having different surface orientations for different channel type transistors. In one example, semiconductor structures having a first surface orientation are formed on a donor wafer. Semiconductor structures having a second surface orientation are formed on a second wafer. Receptor openings are formed on the second wafer. The semiconductor structures having the first surface orientation are located in the receptor openings and transferred to the second wafer. The resultant wafer has semiconductor regions having a first surface orientation for a first channel type of transistor and semiconductor regions having a second surface orientation for a second channel type transistor.
公开/授权文献
- US07288458B2 SOI active layer with different surface orientation 公开/授权日:2007-10-30
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