Invention Application
- Patent Title: Method of fabricating micro actuator having media stage
- Patent Title (中): 具有介质载物台的微型致动器的制造方法
-
Application No.: US11595876Application Date: 2006-11-13
-
Publication No.: US20070137780A1Publication Date: 2007-06-21
- Inventor: Hong-sik Park , Seung-bum Hong , Jong-youp Shim
- Applicant: Hong-sik Park , Seung-bum Hong , Jong-youp Shim
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2005-0126099 20051220
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.
Public/Granted literature
- US07520998B2 Method of fabricating micro actuator having media stage Public/Granted day:2009-04-21
Information query