Micro actuator and data storage apparatus employing the same
    1.
    发明申请
    Micro actuator and data storage apparatus employing the same 有权
    微型执行机构及采用该微型执行机构的数据存储装置

    公开(公告)号:US20070153430A1

    公开(公告)日:2007-07-05

    申请号:US11607957

    申请日:2006-12-04

    IPC分类号: G11B21/24

    摘要: A micro actuator having separated stages and a data storage apparatus employing the same are provided. The micro actuator includes: a supporting unit; stages that are elastically supported by the supporting unit, each stage having a mounting surface where a target driven body is mounted thereon, and arranged adjacent to each other; levers which are disposed between the stages, each lever having two ends respectively connected to adjacent stages, and which apply force to the adjacent stages so that when one of the stages is moved, an adjacent stage is moved in an opposite direction to a moving direction of the moved stage; and driving units which respectively provide a driving force to the stages.

    摘要翻译: 提供了具有分离级的微型致动器和使用其的数据存储装置。 微型致动器包括:支撑单元; 由支撑单元弹性地支撑的台阶,每个阶段具有安装在其上的目标被驱动体的安装表面,并且彼此相邻布置; 设置在各级之间的杠杆,每个杠杆具有分别连接到相邻台阶的两个端部,并且向相邻的台阶施加力,使得当一个台架移动时,相邻的台架沿与移动方向相反的方向移动 的移动阶段; 以及分别向各级提供驱动力的驱动单元。

    Method of fabricating micro actuator having media stage
    2.
    发明授权
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号:US07520998B2

    公开(公告)日:2009-04-21

    申请号:US11595876

    申请日:2006-11-13

    IPC分类号: C23F1/00

    摘要: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    摘要翻译: 提供了一种制造微型致动器的方法,包括:介质台,其具有介质装载表面和用于驱动介质载物台的线圈,其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽,在第二基板的第一表面上形成线圈,将第一基板的第一表面接合到第二基板的第一表面,并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

    X-Y stage driver having locking device and data storage system having the X-Y stage driver
    3.
    发明授权
    X-Y stage driver having locking device and data storage system having the X-Y stage driver 有权
    具有锁定装置的X-Y平台驱动器和具有X-Y平台驱动器的数据存储系统

    公开(公告)号:US07459809B2

    公开(公告)日:2008-12-02

    申请号:US11582336

    申请日:2006-10-18

    IPC分类号: H02K41/00

    摘要: An X-Y stage driver having a locking device and a data storage system having the X-Y stage driver. The X-Y stage driver includes an X-Y stage; a supporting unit that supports the X-Y stage and has elastic beams that support corners of the X-Y stage; a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction; a stiffener that prevents the X-Y stage from rotating; and a locking device that fixes the stiffener by an electrostatic force.

    摘要翻译: 具有锁定装置的X-Y级驱动器和具有X-Y级驱动器的数据存储系统。 X-Y舞台驱动器包括X-Y舞台; 支撑单元,支撑X-Y平台,并具有支撑X-Y平台角部的弹性梁; 驱动单元,其沿与第一方向垂直的第一方向和第二方向驱动X-Y台; 加强件,防止X-Y平台旋转; 以及通过静电力固定加强件的锁定装置。

    X-Y stage driver having locking device and data storage system having the X-Y stage driver
    4.
    发明申请
    X-Y stage driver having locking device and data storage system having the X-Y stage driver 有权
    具有锁定装置的X-Y平台驱动器和具有X-Y平台驱动器的数据存储系统

    公开(公告)号:US20070188199A1

    公开(公告)日:2007-08-16

    申请号:US11582336

    申请日:2006-10-18

    IPC分类号: H03B1/00 G02B21/00

    摘要: An X-Y stage driver having a locking device and a data storage system having the X-Y stage driver. The X-Y stage driver includes an X-Y stage; a supporting unit that supports the X-Y stage and has elastic beams that support corners of the X-Y stage; a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction; a stiffener that prevents the X-Y stage from rotating; and a locking device that fixes the stiffener by an electrostatic force.

    摘要翻译: 具有锁定装置的X-Y级驱动器和具有X-Y级驱动器的数据存储系统。 X-Y舞台驱动器包括X-Y舞台; 支撑单元,支撑X-Y平台,并具有支撑X-Y平台角部的弹性梁; 驱动单元,其沿与第一方向垂直的第一方向和第二方向驱动X-Y台; 加强件,防止X-Y平台旋转; 以及通过静电力固定加强件的锁定装置。

    Micro actuator and data storage apparatus employing the same
    5.
    发明授权
    Micro actuator and data storage apparatus employing the same 有权
    微型执行机构及采用该微型执行机构的数据存储装置

    公开(公告)号:US07889626B2

    公开(公告)日:2011-02-15

    申请号:US11607957

    申请日:2006-12-04

    IPC分类号: G11B9/02

    摘要: A micro actuator having separated stages and a data storage apparatus employing the same are provided. The micro actuator includes: a supporting unit; stages that are elastically supported by the supporting unit, each stage having a mounting surface where a target driven body is mounted thereon, and arranged adjacent to each other; levers which are disposed between the stages, each lever having two ends respectively connected to adjacent stages, and which apply force to the adjacent stages so that when one of the stages is moved, an adjacent stage is moved in an opposite direction to a moving direction of the moved stage; and driving units which respectively provide a driving force to the stages.

    摘要翻译: 提供了具有分离级的微型致动器和使用其的数据存储装置。 微型致动器包括:支撑单元; 由支撑单元弹性地支撑的台阶,每个阶段具有安装在其上的目标被驱动体的安装表面,并且彼此相邻布置; 设置在各级之间的杠杆,每个杠杆具有分别连接到相邻台阶的两个端部,并且向相邻的台阶施加力,使得当一个台架移动时,相邻的台架沿与移动方向相反的方向移动 的移动阶段; 以及分别向各级提供驱动力的驱动单元。

    Method of fabricating micro actuator having media stage
    6.
    发明申请
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号:US20070137780A1

    公开(公告)日:2007-06-21

    申请号:US11595876

    申请日:2006-11-13

    IPC分类号: B32B37/00

    摘要: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    摘要翻译: 提供了一种制造微型致动器的方法,包括:介质台,其具有介质装载表面和用于驱动介质载物台的线圈,其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽,在第二基板的第一表面上形成线圈,将第一基板的第一表面接合到第二基板的第一表面,并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

    Ferroelectric recording medium and writing method for the same
    7.
    发明授权
    Ferroelectric recording medium and writing method for the same 失效
    铁电记录介质和写入方法相同

    公开(公告)号:US07820311B2

    公开(公告)日:2010-10-26

    申请号:US11348485

    申请日:2006-02-07

    IPC分类号: G11B5/64

    摘要: A ferroelectric recording medium and a writing method for the same are provided. The ferroelectric recording medium includes a ferroelectric layer which reverses its polarization when receiving a predetermined coercive voltage. A nonvolatile anisotrophic conduction layer is formed on the ferroelectric layer. A resistance of the anisotrophic conduction layer decreases when receiving a first voltage lower than the coercive voltage, and the resistance of the anisotrophic conduction layer increases when receiving a second voltage higher than the coercive voltage. Multi-bit information is stored by a combination of polarization states of the ferroelectric layer and the resistance of the anisotrophic conduction layer. Accordingly, multiple bits can be expressed on one domain of the ferroelectric recording medium.

    摘要翻译: 提供铁电记录介质及其写入方法。 铁电记录介质包括在接收预定的矫顽电压时反转其极化的铁电层。 在铁电层上形成非挥发性各向异性导电层。 当接收到低于矫顽电压的第一电压时,各向异性传导层的电阻降低,并且当接收到高于矫顽电压的第二电压时,各向异性导电层的电阻增加。 通过铁电层的极化状态和各向异性导电层的电阻的组合来存储多位信息。 因此,可以在铁电记录介质的一个域上表示多个位。

    Semiconductor probe with resistive tip and method of fabricating the same
    9.
    发明授权
    Semiconductor probe with resistive tip and method of fabricating the same 失效
    具有电阻尖端的半导体探针及其制造方法

    公开(公告)号:US07319224B2

    公开(公告)日:2008-01-15

    申请号:US11219732

    申请日:2005-09-07

    IPC分类号: G21K7/00

    摘要: Provided are a semiconductor probe with a resistive tip, and a method of fabricating the semiconductor probe. The method includes forming a stripe-shaped mask layer on a substrate doped with a first impurity, and forming first and second electrode regions by heavily doping portions of the substrate not covered by the mask layer with a second impurity opposite in polarity to the first impurity; annealing the substrate to decrease a gap between the first and second semiconductor electrode regions, and forming resistive regions lightly doped with the second impurity at portions contiguous with the first and second semiconductor electrode regions; forming a stripe-shaped first photoresist orthogonal to the mask layer, and etching the mask layer such that the mask layer has a square shape; forming a second photoresist on the substrate to cover a portion of the first photoresist and define a cantilever region; forming the cantilever region by etching portions not covered by the first and second photoresists; and removing the first and second photoresists, and forming a resistive tip having a semi-quadrangular pyramidal shape by etching portions of the substrate not covered by the mask layer.

    摘要翻译: 提供具有电阻尖端的半导体探针和制造半导体探针的方法。 该方法包括在掺杂有第一杂质的衬底上形成条形掩模层,以及通过以与第一杂质极性相反的第二杂质重掺杂未被掩模层覆盖的衬底的部分来形成第一和第二电极区 ; 退火所述衬底以减小所述第一和第二半导体电极区之间的间隙,以及在与所述第一和第二半导体电极区相邻的部分形成轻掺杂有所述第二杂质的电阻区; 形成与所述掩模层正交的条状的第一光致抗蚀剂,并且蚀刻所述掩模层,使得所述掩模层具有正方形形状; 在所述基板上形成第二光致抗蚀剂以覆盖所述第一光致抗蚀剂的一部分并限定悬臂区域; 通过蚀刻未被第一和第二光致抗蚀剂覆盖的部分形成悬臂区域; 以及去除所述第一和第二光致抗蚀剂,以及通过蚀刻未被所述掩模层覆盖的所述衬底的部分,形成具有半四棱锥形形状的电阻尖端。

    ELECTRIC FIELD INFORMATION READING HEAD, ELECTRIC FIELD INFORMATION WRITING/READING HEAD AND FABRICATION METHODS THEREOF AND INFORMATION STORAGE DEVICE USING THE SAME
    10.
    发明申请
    ELECTRIC FIELD INFORMATION READING HEAD, ELECTRIC FIELD INFORMATION WRITING/READING HEAD AND FABRICATION METHODS THEREOF AND INFORMATION STORAGE DEVICE USING THE SAME 失效
    电场信息读取头,电场信息写入/读取头及其制造方法及其使用的信息存储装置

    公开(公告)号:US20100232061A1

    公开(公告)日:2010-09-16

    申请号:US12300177

    申请日:2007-05-10

    CPC分类号: G11B9/02

    摘要: Provided is an electric field information reading head for reading information from a surface electric charge of an information storage medium, the electric field information reading head comprising a semiconductor substrate having a resistance region formed in a central part at one end of a surface facing a recording medium, the resistance region being lightly doped with impurities, and source and drain regions formed on both sides of the resistance region, the source region and the drain region being more highly doped with impurities than the resistance region. The source region and the drain region extend along the surface of the semiconductor substrate facing the recording medium, and electrodes are connected electrically with the source region and the drain region respectively. In addition, provided is a method of fabricating the electric field information reading head and a method of mass-producing the electric field information reading head on a wafer.

    摘要翻译: 提供一种用于从信息存储介质的表面电荷读取信息的电场信息读取头,电场信息读取头包括半导体衬底,该半导体衬底具有形成在面向记录的表面的一端的中心部分的电阻区域 介质,电阻区域被轻掺杂杂质,形成在电阻区两侧的源区和漏区,源极区和漏区比电阻区更加掺杂杂质。 源极区域和漏极区域沿着面向记录介质的半导体衬底的表面延伸,并且电极分别与源极区域和漏极区域电连接。 此外,提供了制造电场信息读取头的方法和在晶片上批量生成电场信息读取头的方法。