发明申请
US20070145523A1 Integrateable capacitors and microcoils and methods of making thereof
审中-公开
可集成电容器和微型线圈及其制造方法
- 专利标题： Integrateable capacitors and microcoils and methods of making thereof
- 专利标题（中）： 可集成电容器和微型线圈及其制造方法
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申请号： US11319056申请日： 2005-12-28
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公开(公告)号： US20070145523A1公开(公告)日： 2007-06-28
- 发明人: Eugene Chow , Koenraad Schuylenbergh , David Fork , JengPing Lu
- 申请人： Eugene Chow , Koenraad Schuylenbergh , David Fork , JengPing Lu
- 申请人地址： US CA Palo Alto
- 专利权人： PALO ALTO RESEARCH CENTER INCORPORATED
- 当前专利权人： PALO ALTO RESEARCH CENTER INCORPORATED
- 当前专利权人地址： US CA Palo Alto
- 主分类号： H01L29/00
- IPC分类号： H01L29/00
摘要：
Method for integrally forming high Q tunable capacitors and high Q inductors on a substrate are described. A variable capacitors may employ stops between a moveable electrode and a fixed electrode to reduce and/or prevent electrical shorting between the moveable and fixed electrode. A capacitor may employ a split bottom electrode structure to removing a suspension portion of a moveable top electrode from an RF part of a circuit.