Abstract:
A structure has at least one structure component formed of a first material residing on a substrate, such that the structure is out of a plane of the substrate. A first coating of a second material then coats the structure. A second coating of a non-oxidizing material coats the structure at a thickness less than a thickness of the second material.
Abstract:
Method for integrally forming high Q tunable capacitors and high Q inductors on a substrate are described. A variable capacitors may employ stops between a moveable electrode and a fixed electrode to reduce and/or prevent electrical shorting between the moveable and fixed electrode. A capacitor may employ a split bottom electrode structure to removing a suspension portion of a moveable top electrode from an RF part of a circuit.
Abstract:
A print system includes a print structure with a surface. The print system further includes an electrolyte bath in which the surface of the print structure passes through while being exposed by an expose component that forms an image of charge on the surface. An electrolyte from the electrolyte bath adheres to the charge on the surface. The print system further includes an ink bath that applies ink to unexposed portions of the surface to form an inked image on the surface.
Abstract:
Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
Abstract:
Disclosed is a MEMS device which comprises at least one shape memory material such as a shape memory alloy (SMA) layer and at least one stressed material layer. Examples of such MEMS devices include an actuator, a micropump, a microvalve, or a non-destructive fuse-type connection probe. The device exhibits a variety of improved properties, for example, large deformation ability and high energy density. Also provided is a method of easily fabricating the MEMS device in the form of a cantilever-type or diaphragm-type structure.
Abstract:
An out-of-plane micro-structure which can be used for on-chip integration of high-Q inductors and transformers places the magnetic field direction parallel to the substrate plane without requiring high aspect ratio processing. The photolithographically patterned coil structure includes an elastic member having an intrinsic stress profile. The intrinsic stress profile biases a free portion away from the substrate forming a loop winding. An anchor portion remains fixed to the substrate. The free portion end becomes a second anchor portion which may be connected to the substrate via soldering or plating. A series of individual coil structures can be joined via their anchor portions to form inductors and transformers.
Abstract:
A stretchable interconnect for electrically connecting electronic devices comprises a photolithographically patterned conductor extending between two of said devices for electrically coupling a contact of one device to a contact of another device. The stretchable interconnect preferably comprises a coiled conductor. The coiled conductor is formed of a metal or alloy having a stress gradient extending through a thickness of said conductor. A sensor array employs the stretchable interconnects to connect contacts of one electronic device to another electronic device. The sensor array can be employed in a flexible or stretchable sensing skin of a robot as well as other applications. The stretchable interconnects can be formed by a photolithographic process on the same substrate which supports the electronic devices. The interconnects become stretchable when the supporting substrate is removed from the interconnect. Preferably coils which are formed are di-helic.
Abstract:
A micro-electromechanical bistable shutter display device is provided capable of being implemented for both small screen, high resolution devices and for large billboard-type displays. The micro-electromechanical shutter assembly has bi-stability characteristics which allow the use of only a holding voltage to maintain an image. The micro-electromechanical shutter assembly includes a shutter having petal-like shutter segments covering reflective or transmittive films. To expose the film in a particular shutter assembly, its shutter segments are moved from the horizontal to a vertical position using electrostatic attraction forces to “collapse” the torsionally-hinged shutter segments. The shutter assembly can have a number of segments, as long as the resulting shutter assembly shape can be stacked to form a dense 2D array.
Abstract:
A display device uses the presence or absence of a pigmented fluid in a pixel to indicate pixel state. Fluid flow to or extraction from individual pixels is controlled through manipulation of row and column fluid pressures. A pixel wall opposite a viewer may be provided with a background color contrasting the color of the pigmented fluid. When present in the pixel, the pigmented fluid obscures the colored wall of the pixel, and viewer sees the pixel as the color of the fluid (a first state). When the fluid is absent from the pixel, the viewer sees the pixel as the color of the wall of the pixel (a second state). When partially present, the fluid color and the wall color mix to provide grayscale display.
Abstract:
A Cassegrain-type concentrating solar collector cell includes primary and secondary mirrors disposed on opposing convex and concave surfaces of a light-transparent (e.g., glass) optical element. Light enters an aperture surface surrounding the secondary mirror, and is reflected by the primary mirror toward the secondary mirror, which re-reflects the light onto a photovoltaic cell. The photovoltaic cell is mounted on a central portion of heat spreader that extends over the primary mirror. The heat spreader transmits waste heat from the photovoltaic cell in a manner that evenly distributes the heat over the optical element, thereby maximizing the radiation of heat from the aperture surface into space. The heat spreader includes a thick copper layer formed on a flexible substrate (e.g., polyimide film) that is patterned with radial arms that facilitate mounting onto the convex surface of the optical element.