发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US11614527申请日: 2006-12-21
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公开(公告)号: US20070148892A1公开(公告)日: 2007-06-28
- 发明人: Seiji Otake , Ryo Kanda , Shuichi Kikuchi
- 申请人: Seiji Otake , Ryo Kanda , Shuichi Kikuchi
- 专利权人: Sanyo Electric Co., Ltd.
- 当前专利权人: Sanyo Electric Co., Ltd.
- 优先权: JPP2005-376554 20051227
- 主分类号: H01L21/331
- IPC分类号: H01L21/331
摘要:
In a semiconductor device of the present invention, an N type epitaxial layer is stacked on a P type single crystal silicon substrate. In the epitaxial layer, an N type diffusion layer as a base draw-out region, P type diffusion layers as an emitter region, and P type diffusion layers as a collector region are formed. The emitter region has a region having a larger diffusion width in a portion deeper than in a vicinity of a surface thereof. In a lateral PNP transistor, a smallest base width is formed in a deep portion of the epitaxial layer. By use of this structure, even in a case where the collector region is narrowed, a desired hfe value can be realized. Thus, the device size can be reduced.
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