发明申请
- 专利标题： Carbon nanotube and metal thermal interface material, process of making same, packages containing same, and systems containing same
- 专利标题（中）： 碳纳米管和金属热界面材料，其制备方法，包含其的包装和含有其的体系
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申请号： US11323205申请日： 2005-12-30
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公开(公告)号： US20070155136A1公开(公告)日： 2007-07-05
- 发明人: Gregory Chrysler , Thomas Dory , James Maveety , Edward Prack , Unnikrishnan Vadakkanmaruveedu
- 申请人： Gregory Chrysler , Thomas Dory , James Maveety , Edward Prack , Unnikrishnan Vadakkanmaruveedu
- 专利权人： Intel Corporation
- 当前专利权人： Intel Corporation
- 主分类号： H01L21/20
- IPC分类号： H01L21/20
摘要：
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
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