发明申请
- 专利标题: FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): 电影胶卷声谐振器及其制造方法
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申请号: US11687734申请日: 2007-03-19
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公开(公告)号: US20070157442A1公开(公告)日: 2007-07-12
- 发明人: Byeoung-ju HA , Yun-kwon Park , In-sang Song , Il-jong Song , Jong-seok Kim , Duck-hwan Kim , Jun-sik Hwang
- 申请人: Byeoung-ju HA , Yun-kwon Park , In-sang Song , Il-jong Song , Jong-seok Kim , Duck-hwan Kim , Jun-sik Hwang
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 优先权: KR2003-69838 20031008
- 主分类号: H04R17/00
- IPC分类号: H04R17/00 ; B05D5/12
摘要:
A film bulk acoustic resonator, and a method for manufacturing the same. The film bulk acoustic resonator includes a substrate, a protection layer vapor-deposited on the substrate, a membrane vapor-deposited on the protection layer and at a predetermined distance from an upper side of the substrate, and a laminated resonance part vapor-deposited on the membrane. Further, the manufacturing method includes vapor-depositing a membrane on a substrate, forming protection layers on both sides of the membrane, vapor-depositing a laminated resonance part on the membrane, and forming an air gap by removing a part of the substrate disposed between the protection layers. Accordingly, the membrane can be formed in a simple structure and without stress, and the whole manufacturing process is simplified.
公开/授权文献
- US07793395B2 Method for manufacturing a film bulk acoustic resonator 公开/授权日:2010-09-14
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