发明申请
US20070168150A1 Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
失效
用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
- 专利标题： Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
- 专利标题（中）： 用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
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申请号： US10598290申请日： 2005-01-13
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公开(公告)号： US20070168150A1公开(公告)日： 2007-07-19
- 发明人: Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
- 申请人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
- 申请人地址： JP Osaka-shi
- 专利权人： FUJIKIN INCORPORATED
- 当前专利权人： FUJIKIN INCORPORATED
- 当前专利权人地址： JP Osaka-shi
- 优先权： JP2004-047701 20040224
- 国际申请： PCT/JP05/00266 WO 20050113
- 主分类号： G01K1/00
- IPC分类号： G01K1/00
摘要：
The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed. More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion-resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrates, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
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