公开(公告)号：US09133951B2

公开(公告)日：2015-09-15

申请号：US11913271

申请日：2006-05-10

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F16K27/00 ,  F16L55/027 ,  G01F1/36 ,  G01F15/00 ,  G05D7/06

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

摘要翻译： 节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体 流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。

公开(公告)号：US08757197B2

公开(公告)日：2014-06-24

申请号：US12996370

申请日：2009-04-06

申请人： Kaoru Hirata ,  Katsuyuki Sugita ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Katsuyuki Sugita ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： G05D7/0635 ,  Y10T137/7761

摘要： The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.

摘要翻译： 本发明防止了当流量改变或气体分布改变时流量调节器的输出侧的流量发生过冲。 因此，提供了一种自动压力调节器，用于向包括压电元件驱动型压力调节阀的流量调节器，设置在压力调节阀的输出侧的控制压力检测器和控制器提供气体压力， 输入控制压力检测器的值P2和用于控制压力的设定值Pst，其中控制器使用比例控制系统向压力调节阀的压电元件驱动单元提供控制信号，以执行阀开度调节，其中比例 控制器的控制系统设置为通过禁用积分作用来控制控制压力的残留偏差。

公开(公告)号：US08606412B2

公开(公告)日：2013-12-10

申请号：US12307554

申请日：2007-06-13

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Atsushi Matsumoto

IPC分类号： G05D7/00

CPC分类号： G05D7/0635 ,  G01F1/36 ,  G01F15/005 ,  G01F15/022

摘要： With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.

摘要翻译： 利用压力式流量控制装置，释放节气门机构下游侧的阀，改变输入到压力式流量控制装置的流量设定值Qe，以检测流量输出信号的变化幅度DeltaV 当流量设定值Qe变化时，来自压力式流量控制装置的Qo，使得当流量输出的变化幅度DeltaV被确定时，在节气门机构的下游侧的阀的释放操作的正常功能被确认 信号Qo高于预定值。 如果释放操作发生故障，则发现变化幅度DeltaV低于预定值。

公开(公告)号：US08561966B2

公开(公告)日：2013-10-22

申请号：US12439572

申请日：2007-08-21

申请人： Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Yohei Sawada

发明人： Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Yohei Sawada

IPC分类号： F16K31/44 ,  F16K31/02

CPC分类号： F16K31/04 ,  F16K7/16 ,  F16K31/52491

摘要： In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.

摘要翻译： 在步进马达驱动的凸轮阀中，杆在具有流入通道，​​流出通道，阀室和阀座的主体内自由上升和下降。 杆由致动器下降，该致动器由位于杆上方的位置的步进电动机和凸轮机构组成，其将步进电动机的旋转运动改变为线性运动，并将线性运动传递到杆。 阀室内的隔膜或阀杆的下端部的阀体位于阀座上。 支撑致动器自由上升和下降的提升支撑机构布置在覆盖阀室的发动机罩上。 布置在升降支撑机构处的高度精细调节机构，精细地调节致动器相对于杆的高度，以便执行阀的零点调节。

公开(公告)号：US08555920B2

公开(公告)日：2013-10-15

申请号：US12303841

申请日：2007-06-13

申请人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F17D1/04

CPC分类号： G05D7/0664 ,  Y10T137/85938 ,  Y10T137/87314 ,  Y10T137/87539

摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.

摘要翻译： 流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室， 并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上的开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值 通过调节流通孔的总开口面积来分流通道。

公开(公告)号：US20130186471A1

公开(公告)日：2013-07-25

申请号：US13813219

申请日：2011-06-28

申请人： Masaaki Nagase ,  Nobukazu Ikeda ,  Yohei Sawada ,  Tooru Hirai ,  Kazuyuki Morisaki ,  Kouji Nishino ,  Ryousuke Dohi

发明人： Masaaki Nagase ,  Nobukazu Ikeda ,  Yohei Sawada ,  Tooru Hirai ,  Kazuyuki Morisaki ,  Kouji Nishino ,  Ryousuke Dohi

IPC分类号： G01F7/00

CPC分类号： G01F7/005 ,  G01F1/34 ,  G01F15/002 ,  G01F15/005 ,  G01F25/0053 ,  G05D7/0652 ,  Y10T137/0324

摘要： In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.

摘要翻译： 在通过许多流量控制器向气体使用部分供应许多不同气体的气体供应装置中，流量控制器校准单元包括具有内部容积的积聚罐，入口侧开关阀和出口侧开关 阀的阀V2，以及气罐内的气体的气体压力检测器和气体温度检测器，以分支形式连接到气体供给管线，阀V2连接到真空。 校准单元用于基于对罐内的气体温度和压力进行第一次测量，然后将气体积聚到罐中，然后对气体温度和压力进行第二次测量，并从 各个测量值，计算气体流量Q，并通过比较设定的气体流量和计算出的气体流量Q进行流量校准。

公开(公告)号：US20120298220A1

公开(公告)日：2012-11-29

申请号：US13483328

申请日：2012-05-30

申请人： Atsushi HIDAKA ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO

发明人： Atsushi HIDAKA ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO

IPC分类号： F16K17/00

CPC分类号： G01F1/363 ,  G01F15/024 ,  G05D7/0635 ,  Y10T137/7737 ,  Y10T137/776 ,  Y10T137/7761

摘要： A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.

摘要翻译： 压力式流量控制装置为100-500℃的气体提供流量控制，误差不超过1.0％F.S. 压力式流量控制装置包括具有流体通道的阀体，插入通道中的阀部分，驱动阀部分以打开/关闭通道的阀驱动单元，在阀部分的下游侧的限制机构 在通道中，检测器检测阀部分和限制机构之间的气体温度，检测阀部分和限制机构之间的气体压力的压力检测器以及根据检测到的值控制限制机构中的气体流量的算术控制装置 通过温度检测器和压力检测器，其中温度检测器被插入在阀体的安装孔中，恰好在出口侧流体通道的正上方。

公开(公告)号：US08191856B2

公开(公告)日：2012-06-05

申请号：US12852220

申请日：2010-08-06

申请人： Atsushi Matsumoto ,  Kaoru Hirata ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino

发明人： Atsushi Matsumoto ,  Kaoru Hirata ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino

IPC分类号： F16K31/02

CPC分类号： F16K24/04 ,  F16K7/14 ,  F16K31/004 ,  F16K31/007 ,  F16K51/02

摘要： A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.

摘要翻译： 控制阀具有形成阀室和阀座的主体，安装在阀室内部并与阀座接触和离开的金属隔膜，固定在主体侧的致动器盒，安装在压缩元件侧的压电元件 在致动器箱内部，通过金属隔膜压板的调节，通过在施加电压时向下延伸来推动金属隔膜;锥形弹簧机构，其在金属隔膜与阀座接触时吸收压电元件的伸长， 规定的推力被施加到阀座等，以及预压机构，其向压电元件施加向上的压缩力，其中施加到压电元件的压缩力是外部可调节的。

公开(公告)号：US08181932B2

公开(公告)日：2012-05-22

申请号：US12161549

申请日：2006-11-13

申请人： Atsushi Matsumoto ,  Kaoru Hirata ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino

发明人： Atsushi Matsumoto ,  Kaoru Hirata ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino

IPC分类号： F16K31/02

CPC分类号： F16K24/04 ,  F16K7/14 ,  F16K31/004 ,  F16K31/007 ,  F16K51/02

摘要： A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.

摘要翻译： 控制阀具有形成阀室和阀座的主体，安装在阀室内部并与阀座接触和离开的金属隔膜，固定在主体侧的致动器盒，安装在压缩元件侧的压电元件 在致动器箱内部，通过金属隔膜压板的调节，通过在施加电压时向下延伸来推动金属隔膜;锥形弹簧机构，其在金属隔膜与阀座接触时吸收压电元件的伸长， 规定的推力被施加到阀座等，以及预压机构，其向压电元件施加向上的压缩力，其中施加到压电元件的压缩力是外部可调节的。

公开(公告)号：US08162286B2

公开(公告)日：2012-04-24

申请号：US12593580

申请日：2008-03-13

申请人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Kaoru Hirata ,  Ryosuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14

摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.

摘要翻译： 即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。 因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件 ，设置在分离基座和压电致动器之间。