发明申请
- 专利标题: Technique for Improving Uniformity of a Ribbon Beam
- 专利标题(中): 提高丝带梁均匀性的技术
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申请号: US11537011申请日: 2006-09-29
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公开(公告)号: US20070170369A1公开(公告)日: 2007-07-26
- 发明人: Kenneth H. Purser , Atul Gupta
- 申请人: Kenneth H. Purser , Atul Gupta
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: H01J37/153
- IPC分类号: H01J37/153
摘要:
A technique for improving uniformity of a ribbon beam is disclosed. In one particular exemplary embodiment, an apparatus may comprise a first corrector-bar assembly and a second corrector-bar assembly, wherein the second corrector-bar assembly is located at a predetermined distance from the first corrector-bar assembly. Each of a first plurality of coils in the first corrector-bar assembly may be individually excited to deflect at least one beamlet in the ribbon beam, thereby causing the beamlets to arrive at the second corrector-bar assembly in a desired spatial spread. Each of a second plurality of coils in the second corrector-bar assembly may be individually excited to further deflect one or more beamlets in the ribbon beam, thereby causing the beamlets to exit the second corrector-bar assembly at desired angles.
公开/授权文献
- US07525103B2 Technique for improving uniformity of a ribbon beam 公开/授权日:2009-04-28
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