- 专利标题： Insulating tube, semiconductor device employing the tube, and method of manufacturing the same
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申请号： US11715844申请日： 2007-03-09
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公开(公告)号： US20070170594A1公开(公告)日： 2007-07-26
- 发明人: Tsuyoshi Matsumura , Takahito Nakajima , Hiroshi Kawamoto , Mikie Miyasato , Yoshihiro Uozumi
- 申请人： Tsuyoshi Matsumura , Takahito Nakajima , Hiroshi Kawamoto , Mikie Miyasato , Yoshihiro Uozumi
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 优先权： JPP2003-202486 20030728
- 主分类号： H01L23/48
- IPC分类号： H01L23/48 ; H01L21/4763
摘要：
An insulating tube includes a underlying insulating film, a first sidewall insulating film disposed on the underlying insulating film, a second sidewall insulating film disposed on the underlying insulating film, opposite to the first sidewall insulating film so as to provide a cavity between the first and second sidewall insulating films having the same height as the first sidewall insulating film, and an upper insulating film provided over the first and second sidewall insulating films.
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