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发明申请
US20070186858A1 Susceptor 审中-公开
受害者

Susceptor
摘要：
A susceptor used in semiconductor epitaxial growth that can simultaneously obtain a plurality of epitaxial films high in uniformity. The susceptor includes a barrel type susceptor having a plurality of surfaces on an outer side of each of which a plurality of substrates can be freely disposed, and a member that has the barrel type susceptor disposed inside thereof and surfaces each of which is oppositely disposed tilting in the same direction as each of the surfaces of the barrel type susceptor. Alternatively, a susceptor includes a barrel type susceptor having a plurality of surfaces on an inner side of each of which a plurality of substrates can be freely disposed, and a member that has the barrel type susceptor disposed at the peripheral portion thereof and surfaces each of which is oppositely disposed tilting in the same direction as each of the surfaces of the barrel type susceptor.
摘要（中）：

用于半导体外延生长的感受体可以同时获得高均匀性的多个外延膜。 所述基座包括：筒状基座，其外侧上具有多个可自由布置的基板的多个表面;以及具有设置在其内部的所述筒状基座的构件，其表面各倾斜相对设置 在与桶形基座的每个表面相同的方向上。 或者，基座包括：筒型基座，其内侧具有多个表面，每个表面可以自由地设置多个基板;以及构件，其具有设置在其周边部分的圆筒型基座， 其相对地设置在与筒型基座的每个表面相同的方向上倾斜。

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