发明申请
- 专利标题: Substrate storage container
- 专利标题(中): 基材储存容器
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申请号: US10592043申请日: 2005-03-09
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公开(公告)号: US20070187287A1公开(公告)日: 2007-08-16
- 发明人: Junya Toda , Takayuki Nakayama
- 申请人: Junya Toda , Takayuki Nakayama
- 优先权: JP2004-070470 20040312
- 国际申请: PCT/JP05/04095 WO 20050309
- 主分类号: B65D85/00
- IPC分类号: B65D85/00
摘要:
A substrate storage container is provided which can convey, fix and store substrates safely, with threaded members not being loosened by a load applied to a mounting member of the substrate storage container when the container storing substrates is conveyed or when the container is fixed to a substrate processing apparatus and by a heating process at the time of washing and drying of the container. For fastening the mounting member (6), such as a side plate for conveyance, a bottom plate for positioning the container with respect to a substrate processing apparatus, etc., to the substrate storage container including a container body (1) and a lid (2) by threaded members (3), a locking means for preventing loosening of the threaded members (3) is interposed between engagement surfaces of each threaded member (3) and the mounting member (6).
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