公开(公告)号：US07658290B2

公开(公告)日：2010-02-09

申请号：US12034040

申请日：2008-02-20

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D51/16 ,  B65D85/30 ,  H01L21/02

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US20080149528A1

公开(公告)日：2008-06-26

申请号：US12034040

申请日：2008-02-20

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/00

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US07658289B2

公开(公告)日：2010-02-09

申请号：US12021719

申请日：2008-01-29

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D51/16 ,  B65D85/30 ,  H01L21/02

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

公开(公告)号：US07455180B2

公开(公告)日：2008-11-25

申请号：US10496932

申请日：2003-10-01

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/30

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US20080149527A1

公开(公告)日：2008-06-26

申请号：US12021719

申请日：2008-01-29

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/00

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accomodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 衬底存储容器包括用于容纳半导体晶片的容纳主体和对准容器主体前部的门，以及设置在容器本体底部以控制气体流动的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US20070187287A1

公开(公告)日：2007-08-16

申请号：US10592043

申请日：2005-03-09

申请人： Junya Toda ,  Takayuki Nakayama

发明人： Junya Toda ,  Takayuki Nakayama

IPC分类号： B65D85/00

CPC分类号： H01L21/67386 ,  F16B35/06 ,  F16B39/24 ,  F16B39/282

摘要： A substrate storage container is provided which can convey, fix and store substrates safely, with threaded members not being loosened by a load applied to a mounting member of the substrate storage container when the container storing substrates is conveyed or when the container is fixed to a substrate processing apparatus and by a heating process at the time of washing and drying of the container. For fastening the mounting member (6), such as a side plate for conveyance, a bottom plate for positioning the container with respect to a substrate processing apparatus, etc., to the substrate storage container including a container body (1) and a lid (2) by threaded members (3), a locking means for preventing loosening of the threaded members (3) is interposed between engagement surfaces of each threaded member (3) and the mounting member (6).

摘要翻译： 提供了能够安全地输送，固定和存储基板的基板存储容器，当输送容器储存基板时，或者当容器固定到基板存储容器时，螺纹构件不被施加到基板存储容器的安装构件的载荷松动 基板处理装置以及洗涤和干燥容器时的加热处理。 为了将诸如用于输送的侧板的安装构件（6）紧固到用于将容器相对于基板处理装置等定位的底板到包括容器主体（1）和盖的基板存储容器 （2）通过螺纹构件（3），用于防止螺纹构件（3）松动的锁定装置插入在每个螺纹构件（3）和安装构件（6）的接合表面之间。

公开(公告)号：US20050077204A1

公开(公告)日：2005-04-14

申请号：US10496932

申请日：2003-10-01

申请人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

发明人： Atsushi Sumi ,  Junya Toda ,  Takayuki Nakayama

IPC分类号： F16K15/02 ,  H01L21/00 ,  H01L21/673 ,  B65D85/30

CPC分类号： H01L21/67379 ,  F16K15/026 ,  H01L21/67017 ,  H01L21/67393 ,  Y10T137/7834

摘要： A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

摘要翻译： 基板储存容器包括用于容纳和对准半导体晶片的容器主体，开闭容器主体前部的门和设置在容器主体底部以控制气流的一对阀单元。 每个阀单元包括用于气体流动的固定套筒，该固定套管装配在容器主体的通孔的肋中;保持套筒，其装配在容器主体的通孔中，并具有插入其中的O形环， 固定套筒，内置在固定套筒和保持套筒之间的止回阀，留下间隙，用于打开和关闭止回阀的可弹性变形的元件，用于气体流动的内部盖套筒，与止回阀相对并支撑可弹性变形 元件和插入在保持套筒和内盖套筒之间的过滤器。

公开(公告)号：US20150212162A1

公开(公告)日：2015-07-30

申请号：US14417473

申请日：2012-07-27

申请人： Takayuki Nakayama ,  Akio Minakuchi

发明人： Takayuki Nakayama ,  Akio Minakuchi

IPC分类号： G01R31/36 ,  G01R31/02

CPC分类号： G01R31/3627 ,  G01R31/025 ,  G01R31/3641

摘要： A secondary battery is charged at a predetermined charging current density to a first SOC, and discharged at a discharging current density same as the charging current density to a second SOC smaller than the first SOC, the voltage thereof is stabilized by leaving the secondary battery for a predetermined time while maintaining the secondary battery in the range of ±3° C. from the battery temperature of the secondary battery that has been discharged, the secondary battery the voltage of which has been stabilized is self-discharged under room temperature, and the presence or absence of a short-circuit is detected on the basis of a voltage drop amount after a given time.

摘要翻译： 二次电池以预定的充电电流密度充电到第一SOC，并且以与充电电流密度相同的放电电流密度放电至小于第一SOC的第二SOC，其电压通过将二次电池 在将二次电池保持在已经放电的二次电池的电池温度±3℃的范围内的预定时间，其电压已经稳定的二次电池在室温下自放电，并且 基于给定时间之后的电压降量来检测短路的存在或不存在。

公开(公告)号：US08475395B2

公开(公告)日：2013-07-02

申请号：US10544431

申请日：2004-02-12

申请人： Toru Nakayama ,  Mariko Nakayama ,  Masafumi Nakayama ,  Takayuki Nakayama

发明人： Toru Nakayama ,  Mariko Nakayama ,  Masafumi Nakayama ,  Takayuki Nakayama

IPC分类号： A61B5/00

CPC分类号： A61B5/150022 ,  A61B5/150106 ,  A61B5/150229

摘要： A method is provided for collecting a small blood sample by painlessly puncturing a finger. When the skin of a human being is punctured by a needle or another device at the depth that does not exceed 0.5 mm, pain accompanying the puncture is diminished or decreased. Regardless of an error in the depth of the puncture, the depth of puncture must not exceed this depth. The puncture site is located on the dorsal surface of a finger, in the area from the finger joint (IP joint of thumb, DIP joint of fingers other than thumb) to the proximal nail wall and the area extending from the proximal nail wall to the lateral nail wall.

公开(公告)号：US20110000817A1

公开(公告)日：2011-01-06

申请号：US12921411

申请日：2009-04-10

申请人： Masato Hosoi ,  Takayuki Nakayama

发明人： Masato Hosoi ,  Takayuki Nakayama

IPC分类号： B65D85/86 ,  B65D81/02

CPC分类号： H01L21/67369

摘要： When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate.

摘要翻译： 当基板的位置偏移时，通过使用从框架的垂直方向部分向内突出的弹性片来控制基板的位置，使基板返回到原始位置。 此外，连接片设置成在垂直方向上延伸并且其两端连接到框架的水平方向部分，并且在联接片上设置有突出在基板容器内的突出部分。 然后，该突出部构成为具有与基板相交的方向倾斜的倾斜面，能够与基板的周边接触，由此该倾斜面引导基板，以降低基板的摩擦， 以控制衬底的位置。