发明申请
US20070205444A1 Architecture of a n-type metal-oxide-semiconductor transistor with a compressive strained silicon-germanium channel fabricated on a silicon (110) substrate
审中-公开
具有在硅(110)衬底上制造的压应变硅 - 锗通道的n型金属氧化物半导体晶体管的结构
- 专利标题: Architecture of a n-type metal-oxide-semiconductor transistor with a compressive strained silicon-germanium channel fabricated on a silicon (110) substrate
- 专利标题(中): 具有在硅(110)衬底上制造的压应变硅 - 锗通道的n型金属氧化物半导体晶体管的结构
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申请号: US11431697申请日: 2006-05-11
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公开(公告)号: US20070205444A1公开(公告)日: 2007-09-06
- 发明人: Guangli Luo , Chao-Hsin Chien , Tsung-Hsi Yang , Chun-Yen Chang
- 申请人: Guangli Luo , Chao-Hsin Chien , Tsung-Hsi Yang , Chun-Yen Chang
- 优先权: TW95107229 20060303
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
The present invention discloses an architecture of a NMOS transistor with a compressive strained Si—Ge channel fabricated on a silicon (110) substrate, which comprises: a p-silicon (110) substrate, two n+ ion-implanted regions functioning as the source and the drain respectively, a compressive strained Si—Ge channel layer, and a gate structure. The compressive strained Si—Ge channel layer is grown on the p-silicon (110) substrate to reduce the electron conductivity effective mass in the [1_l -10] crystallographic direction and to promote the electron mobility in the [1-10] crystallographic direction. Thus, the present invention can improve the electron mobility of a NMOS transistor via the channels fabricated on the silicon (110) substrate. Further, the NMOS transistor of the present invention can combine with a high-speed PMOS transistor on a silicon (110) substrate to form a high-performance CMOS transistor on the same silicon (110) substrate.
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