Invention Application
- Patent Title: BI-CONVEX SOLID IMMERSION LENS
- Patent Title (中): BI-CONVEX固体浸润镜
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Application No.: US11746036Application Date: 2007-05-08
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Publication No.: US20070205795A1Publication Date: 2007-09-06
- Inventor: Nader PAKDAMAN , James Vickers
- Applicant: Nader PAKDAMAN , James Vickers
- Applicant Address: US CA Milpitas
- Assignee: CREDENCE SYSTEMS CORPORATION
- Current Assignee: CREDENCE SYSTEMS CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: G01R31/26
- IPC: G01R31/26
Abstract:
A bi-convex solid immersion lens is disclosed, having a top and bottom convex surfaces. The radius of curvature of the bottom surface is larger than that of the top surface. A conical sloped side-wall connects the top and bottom surface.
Public/Granted literature
- US07492529B2 Bi-convex solid immersion lens Public/Granted day:2009-02-17
Information query
