发明申请
- 专利标题: Lateral DMOS transistor and method for the production thereof
- 专利标题(中): 侧面DMOS晶体管及其制造方法
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申请号: US11730514申请日: 2007-04-02
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公开(公告)号: US20070235779A1公开(公告)日: 2007-10-11
- 发明人: Franz Dietz , Volker Dudek , Thomas Hoffmann , Michael Graf , Stefan Schwantes
- 申请人: Franz Dietz , Volker Dudek , Thomas Hoffmann , Michael Graf , Stefan Schwantes
- 专利权人: ATMEL Germany GmbH
- 当前专利权人: ATMEL Germany GmbH
- 优先权: DEDE102004049246.8 20041001
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L21/8234
摘要:
A lateral DMOS-transistor is provided that includes a MOS-diode made of a semi-conductor material of a first type of conductivity, a source-area of a second type of conductivity and a drain-area of a second type of conductivity which is separated from the MOS-diode by a drift region made of a semi-conductor material of a second type of conductivity which is at least partially covered by a dielectric gate layer which also covers the semi-conductor material of the MOS-diode. The dielectric gate-layer comprises a first region of a first thickness and a second region of a second thickness. The first region covers the semi-conductor material of the MOS-diode and the second region is arranged on the drift region. A transition takes place from the first thickness to the second thickness such that an edge area of the drift region which is oriented towards the MOS-diode is arranged below the second area of the gate layer. The invention also relates to a method for the production of these types of DMOS-transistors.
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