发明申请
US20070236832A1 Lift-off method for forming write pole of a magnetic write head and write pole formed thereby
失效
用于形成磁写头和由此形成的写磁极的写极的剥离方法
- 专利标题: Lift-off method for forming write pole of a magnetic write head and write pole formed thereby
- 专利标题(中): 用于形成磁写头和由此形成的写磁极的写极的剥离方法
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申请号: US11399820申请日: 2006-04-07
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公开(公告)号: US20070236832A1公开(公告)日: 2007-10-11
- 发明人: Hamid Balamane , Jyh-Shuey Lo , Yi Zheng
- 申请人: Hamid Balamane , Jyh-Shuey Lo , Yi Zheng
- 主分类号: G11B5/147
- IPC分类号: G11B5/147
摘要:
A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is -left to provide support to the sidewall fencing.
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