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    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby
    1.
    发明申请
    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby 失效
    用于形成磁写头和由此形成的写磁极的写极的剥离方法

    公开(公告)号：US20070236832A1

    公开(公告)日：2007-10-11

    申请号：US11399820

    申请日：2006-04-07

    申请人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

    发明人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043

    摘要： A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is -left to provide support to the sidewall fencing.

    摘要翻译： 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 去除写磁极顶部的材料层的部分，同时侧壁围栏处的材料层是左侧，以向侧壁围栏提供支撑。

    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby
    2.
    发明授权
    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby 失效
    用于形成磁写头和由此形成的写磁极的写极的剥离方法

    公开(公告)号：US07554764B2

    公开(公告)日：2009-06-30

    申请号：US11399820

    申请日：2006-04-07

    申请人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

    发明人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043

    摘要： A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is left to provide support to the sidewall fencing.

    摘要翻译： 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 除去写磁极顶部的材料层的部分，同时留下侧壁围栏处的材料层以向侧壁围栏提供支撑。

    Method for manufacturing P3 layer of a perpendicular magnetic write head
    4.
    发明授权
    Method for manufacturing P3 layer of a perpendicular magnetic write head 失效
    用于制造垂直磁写头的P3层的方法

    公开(公告)号：US07395595B2

    公开(公告)日：2008-07-08

    申请号：US11110534

    申请日：2005-04-19

    申请人： Kim Yang Lee ,  Jyh-Shuey Lo ,  Yi Zheng

    发明人： Kim Yang Lee ,  Jyh-Shuey Lo ,  Yi Zheng

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49071 ,  Y10T29/49073

    摘要： A method for forming a P3 layer with NiFe and alumina mask using resist shrink process for use in perpendicular magnetic write heads. The method includes forming a laminated layer, forming an alumina layer on top of the laminated layer, depositing a conductive layer onto the laminated layer, forming a plating frame on a gap layer. The plating frame has a trench defined by plating track, the alumina, laminated and conductive layers each including an area below the trench. The method further includes shrinking the trench, plating NiFe into a portion of the shrunk trench, stripping the plating frame, removing the conductive layer except the conductive layer formed below the trench, removing the alumina layer except the alumina layer formed below the trench, removing the laminated layer except the laminated layer formed below the trench and patterning the laminated layer formed below the trench.

    摘要翻译： 使用用于垂直磁性写入头的抗蚀剂收缩工艺来形成具有NiFe和氧化铝掩模的P 3层的方法。 该方法包括形成叠层，在叠层上形成氧化铝层，在层压层上沉积导电层，在间隙层上形成电镀框架。 电镀框架具有由电镀轨道限定的沟槽，氧化铝，层压和导电层各自包括沟槽下方的区域。 该方法还包括收缩沟槽，将NiFe电镀到收缩沟槽的一部分中，剥离电镀框架，除去形成在沟槽下方的导电层以外的导电层，除去形成在沟槽下方的氧化铝层以外的氧化铝层，除去 除了形成在沟槽下方的层压层之外的层压层，并且对形成在沟槽下方的叠层进行图案化。

    P3 fabrication with NiFe and alumina mask using resist shrinking process
    5.
    发明申请
    P3 fabrication with NiFe and alumina mask using resist shrinking process 失效
    P3使用抗蚀剂收缩工艺制备NiFe和氧化铝掩模

    公开(公告)号：US20060232882A1

    公开(公告)日：2006-10-19

    申请号：US11110534

    申请日：2005-04-19

    申请人： Kim Lee ,  Jyh-Shuey Lo ,  Yi Zheng

    发明人： Kim Lee ,  Jyh-Shuey Lo ,  Yi Zheng

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/49071 ,  Y10T29/49073

    摘要： A method for forming a P3 layer with NiFe and alumina mask using resist shrink process for use in perpendicular magnetic write heads. The method includes forming a laminated layer, forming an alumina layer on top of the laminated layer, depositing a conductive layer onto the laminated layer, forming a plating frame on a gap layer. The plating frame has a trench defined by plating track, the alumina, laminated and conductive layers each including an area below the trench. The method further includes shrinking the trench, plating NiFe into a portion of the shrunk trench, stripping the plating frame, removing the conductive layer except the conductive layer formed below the trench, removing the alumina layer except the alumina layer formed below the trench, removing the laminated layer except the laminated layer formed below the trench and patterning the laminated layer formed below the trench.

    摘要翻译： 用于使用用于垂直磁写头的抗蚀剂收缩工艺形成具有NiFe和氧化铝掩模的P3层的方法。 该方法包括形成叠层，在叠层上形成氧化铝层，在层压层上沉积导电层，在间隙层上形成电镀框架。 电镀框架具有由电镀轨道限定的沟槽，氧化铝，层压和导电层各自包括沟槽下方的区域。 该方法还包括收缩沟槽，将NiFe电镀到收缩沟槽的一部分中，剥离电镀框架，除去形成在沟槽下方的导电层以外的导电层，除去形成在沟槽下方的氧化铝层以外的氧化铝层，除去 除了形成在沟槽下方的层压层之外的层压层，并且对形成在沟槽下方的叠层进行图案化。

    Write head design and method for reducing adjacent track interference in at very narrow track widths
    6.
    发明申请
    Write head design and method for reducing adjacent track interference in at very narrow track widths 有权
    用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法

    公开(公告)号：US20070115584A1

    公开(公告)日：2007-05-24

    申请号：US11286077

    申请日：2005-11-23

    申请人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

    发明人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49021

    摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.

    摘要翻译： 垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。 用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制，并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。 该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极，然后进行离子铣削以形成写入极。 一旦形成了写极，就可以共形沉积一层氧化铝或其它非磁性材料。 可以执行反应离子磨（RIM）以打开写柱的顶部（去除氧化铝层的水平放置的部分）。 然后，可以沉积第二层氧化铝或一些其它非磁性材料，并且可以对写入极进行电镀。 侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定，而第一磁性层的厚度限定了后屏蔽间隙的厚度。

    Method for manufacturing a magnetic write head using a protective layer to prevent write pole consumption
    7.
    发明授权
    Method for manufacturing a magnetic write head using a protective layer to prevent write pole consumption 有权
    使用保护层制造磁写头以防止写入极消耗的方法

    公开(公告)号：US07765677B2

    公开(公告)日：2010-08-03

    申请号：US11407320

    申请日：2006-04-18

    申请人： Hamid Balamane ,  Yvette Chung Nga Winton ,  Yi Zheng

    发明人： Hamid Balamane ,  Yvette Chung Nga Winton ,  Yi Zheng

    IPC分类号： G11B5/193

    CPC分类号： G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/4906

    摘要： A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.

    摘要翻译： 一种制造写入极的方法，该写入极在离子铣除去线圈和极种子层期间防止P2基座消耗。 写头可以通过形成第一极，然后在第一极上形成磁性基座（P2）来构造。 例如氧化铝的保护层沉积在极尖区域中的基座的一部分上，使基座的一部分露出在扩口区域中。 然后可以沉积线圈种子层并形成线圈。 当线圈种子层被去除时，例如通过离子铣削，底座的极尖区域被保护层防止离子铣削。 类似地，可以通过首先沉积导电的磁性种子​​层然后电镀顶极来沉积顶极。 当通过离子研磨去除顶极种子层时，保护基座的极尖区域被保护层除去。