发明申请
- 专利标题: Extendable electrode for gas discharge laser
- 专利标题(中): 气体放电激光可扩展电极
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申请号: US11787463申请日: 2007-04-16
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公开(公告)号: US20070253459A1公开(公告)日: 2007-11-01
- 发明人: Richard Sandstrom , Tae (Mark) Chung , Richard Ujazdowski
- 申请人: Richard Sandstrom , Tae (Mark) Chung , Richard Ujazdowski
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/097
- IPC分类号: H01S3/097 ; H01S3/038
摘要:
Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
公开/授权文献
- US07856044B2 Extendable electrode for gas discharge laser 公开/授权日:2010-12-21
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