Extendable electrode for gas discharge laser
    1.
    发明申请
    Extendable electrode for gas discharge laser 有权
    气体放电激光可扩展电极

    公开(公告)号:US20070253459A1

    公开(公告)日:2007-11-01

    申请号:US11787463

    申请日:2007-04-16

    IPC分类号: H01S3/097 H01S3/038

    摘要: Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.

    摘要翻译: 本文公开了用于在横向放电气体激光室中延伸一个或两个放电电极的系统和方法,其中一个或两个电极由于侵蚀而经受尺寸变化。 可以执行电极延伸以增加室的寿命,在室的寿命或两者都增加激光器性能。 可操作地,可以调整电极间间隔以维持电极之间的特定目标间隙距离或者优化激光输出光束的特定参数,例如带宽,脉冲到脉冲能量稳定性,光束尺寸等。

    High pulse repetition rate gas discharge laser

    公开(公告)号:US20060291517A1

    公开(公告)日:2006-12-28

    申请号:US11169203

    申请日:2005-06-27

    IPC分类号: H01S3/22 H01S3/03 H01S3/097

    CPC分类号: H01S3/036 H01S3/0384

    摘要: A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise the high voltage electrode being disposed in an electrode receiving pocket in the main insulator and formed to present an elongated discharge receiving area facing another electrode within the gas discharge chamber, an aerodynamic fairing attached to the high voltage electrode and substantially closing the gas flow disturbance pocket and presenting an aerodynamically smooth surface to the gas flow.

    Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
    5.
    发明申请
    Thermal-expansion tolerant, preionizer electrode for a gas discharge laser 有权
    用于气体放电激光器的热膨胀容限预除电极

    公开(公告)号:US20070091972A1

    公开(公告)日:2007-04-26

    申请号:US11237535

    申请日:2005-09-27

    摘要: A corona-discharge type, prelonizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having a first end disposed in the bore of the tube. In addition, the electrode may include a second elongated conductive member having a first end disposed in the bore and spaced from the first end of the first conductive member. For the assembly, the first and second conductive members may be held at a same voltage potential.

    摘要翻译: 公开了一种用于气体放电激光器的电晕放电型预振器组件。 组件可以包括限定管孔的电极和中空的电介质管。 在一个方面,电极可以包括第一细长导电构件,其具有设置在管的孔中的第一端。 此外,电极可以包括第二细长导电构件,其具有设置在孔中并与第一导电构件的第一端隔开的第一端。 对于组件,第一和第二导电构件可以保持在相同的电压电位。

    Gas discharge laser chamber improvements

    公开(公告)号:US20050226301A1

    公开(公告)日:2005-10-13

    申请号:US10815387

    申请日:2004-03-31

    摘要: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

    Halogen gas discharge laser electrodes

    公开(公告)号:US20050047471A1

    公开(公告)日:2005-03-03

    申请号:US10877737

    申请日:2004-06-25

    摘要: A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.

    System and method for control of a Pockel's cell
    9.
    发明授权
    System and method for control of a Pockel's cell 失效
    用于控制普克尔细胞的系统和方法

    公开(公告)号:US5548234A

    公开(公告)日:1996-08-20

    申请号:US361739

    申请日:1994-12-21

    摘要: A two-step solid state optical switch system includes an electro-optical material positioned between a first electrode and a grounded second electrode. A voltage source is electrically connectable to the first electrode by an ON switch. When the ON switch is closed, a plurality of field effect transistors establish electrical contact between the voltage source and the first electrode to charge the first electrode and change the optical characteristics of the electro-optical material. An OFF switch, which is also electrically connectable to the first electrode, includes a plurality of field effect transistors, which establish electrical contact between ground and the first electrode when the OFF switch is closed. With the closing of the OFF switch, any voltage on the first electrode is removed to restore the optical characteristics of the electro-optical material. Electronic components of the system selectively activate the ON switch and the OFF switch in a sequence so that both switches are never simultaneously closed.

    摘要翻译: 两步固态光开关系统包括位于第一电极和接地的第二电极之间的电光材料。 电压源通过ON开关电连接到第一电极。 当ON开关闭合时,多个场效应晶体管建立电压源和第一电极之间的电接触,以对第一电极充电并改变电光材料的光学特性。 也可电连接到第一电极的OFF开关包括多个场效应晶体管,当OFF开关闭合时,该场效应晶体管在地与第一电极之间建立电接触。 随着OFF开关的关闭,去除第一电极上的任何电压以恢复电光材料的光学特性。 系统的电子部件按顺序选择性地激活ON开关和OFF开关,使得两个开关从不同时关闭。