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公开(公告)号:US20070253459A1
公开(公告)日:2007-11-01
申请号:US11787463
申请日:2007-04-16
CPC分类号: H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要: Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
摘要翻译: 本文公开了用于在横向放电气体激光室中延伸一个或两个放电电极的系统和方法,其中一个或两个电极由于侵蚀而经受尺寸变化。 可以执行电极延伸以增加室的寿命,在室的寿命或两者都增加激光器性能。 可操作地,可以调整电极间间隔以维持电极之间的特定目标间隙距离或者优化激光输出光束的特定参数,例如带宽,脉冲到脉冲能量稳定性,光束尺寸等。