发明申请
US20070256637A1 METHODS AND APPARATUS FOR USING A REINFORCED DIFFUSER IN SUBSTRATE PROCESSING
审中-公开
在基板加工中使用增强扩散器的方法和装置
- 专利标题： METHODS AND APPARATUS FOR USING A REINFORCED DIFFUSER IN SUBSTRATE PROCESSING
- 专利标题（中）： 在基板加工中使用增强扩散器的方法和装置
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申请号： US11741745申请日： 2007-04-28
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公开(公告)号： US20070256637A1公开(公告)日： 2007-11-08
- 发明人: William Bagley , Toshio Kiyotake , Masahiko Kowaka
- 申请人： William Bagley , Toshio Kiyotake , Masahiko Kowaka
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
The invention provides methods and apparatus for using a reinforced gas diffuser in substrate processing. A gas diffuser for use in a PECVD processes includes an aluminum plate with reinforcement material embedded within the aluminum plate. The reinforcement material is adapted to support the aluminum plate and maintain a flatness of the aluminum plate. Numerous other aspects are disclosed.