利索-全球专利检索

  1. 登录
  2. 注册
发明申请
US20070257370A1 MULTILAYER ELECTRODE STRUCTURES INCLUDING CAPACITOR STRUCTURES HAVING ALUMINUM OXIDE DIFFUSION BARRIERS AND METHODS OF FORMING THE SAME 有权
包括具有氧化铝扩散障碍物的电容器结构的多层电极结构及其形成方法

MULTILAYER ELECTRODE STRUCTURES INCLUDING CAPACITOR STRUCTURES HAVING ALUMINUM OXIDE DIFFUSION BARRIERS AND METHODS OF FORMING THE SAME
摘要：
A multilayer electrode structure has a conductive layer including aluminum, an oxide layer formed on the conductive layer, and an oxygen diffusion barrier layer. The oxide layer includes zirconium oxide and/or titanium oxide. The oxygen diffusion barrier layer is formed at an interface between the conductive layer and the oxide layer by re-oxidizing the oxide layer. The oxygen diffusion barrier layer includes aluminum oxide.
摘要（中）：

多层电极结构具有包括铝的导电层，形成在导电层上的氧化物层和氧扩散阻挡层。 氧化物层包括氧化锆和/或氧化钛。 通过再氧化氧化层，在导电层和氧化物层之间的界面处形成氧扩散阻挡层。 氧扩散阻挡层包括氧化铝。

公开/授权文献
信息查询
Global Dossier Espacenet
0/0