- 专利标题: Method for manufacturing display device
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申请号: US11826815申请日: 2007-07-18
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公开(公告)号: US20070262318A1公开(公告)日: 2007-11-15
- 发明人: Hironobu Shoji , Shinji Maekawa , Kensuke Yoshizumi , Tatsuya Honda , Yukie Suzuki , Ikuko Kawamata , Shunpei Yamazaki
- 申请人: Hironobu Shoji , Shinji Maekawa , Kensuke Yoshizumi , Tatsuya Honda , Yukie Suzuki , Ikuko Kawamata , Shunpei Yamazaki
- 优先权: JP2004-251036 20040830
- 主分类号: H01L29/04
- IPC分类号: H01L29/04
摘要:
The present invention provides a method for manufacturing a display device having a TFT that can be operated at high speed while using a small number of photomasks and improving the utilization efficiency of materials, where the threshold value is difficult to be varied. In the invention, a catalytic element is applied to an amorphous semiconductor film and the amorphous semiconductor film is heated to form a crystalline semiconductor film. After removing the catalytic element from the crystalline semiconductor film, a top-gate type thin film transistor with a planar structure is manufactured. Moreover, by using the droplet discharging method where an element of a display device is formed selectively, the process can be simplified, and loss of materials can be reduced.
公开/授权文献
- US07800113B2 Method for manufacturing display device 公开/授权日:2010-09-21
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