Invention Application
- Patent Title: ARRAY SUBSTRATES FOR USE IN LIQUID CRYSTAL DISPLAYS AND FABRICATION METHODS THEREOF
- Patent Title (中): 用于液晶显示器的阵列基板及其制造方法
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Application No.: US11765528Application Date: 2007-06-20
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Publication No.: US20070264736A1Publication Date: 2007-11-15
- Inventor: Chun-Ju Huang
- Applicant: Chun-Ju Huang
- Applicant Address: TW Hsinchu
- Assignee: AU OPTRONICS CORP.
- Current Assignee: AU OPTRONICS CORP.
- Current Assignee Address: TW Hsinchu
- Priority: TW93134428 20041111
- Main IPC: H01L21/822
- IPC: H01L21/822

Abstract:
Array substrates for use in TFT-LCDs and fabrication methods thereof. A transparent conductive layer, a first metal layer, a first insulating layer, a semiconductor layer, a second insulating layer and a sacrificial layer are sequentially formed on a substrate. With a first photomask, a photoresist layer with various thicknesses is formed on part of the sacrificial layer. Using the photoresist layer as an etching mask, a gate line having a gate, a channel layer on the gate, a gate pad at the end portion of the gate line, a pixel electrode and a source pad are defined. An insulating spacer is formed on the sidewalls of the gate and gate line. With a second photomask, a source line, source and drain are formed. The source pad connects the end portion of the source line. An array substrate is thus obtained with only two photomasks.
Public/Granted literature
- US07718994B2 Array substrates for use in liquid crystal displays and fabrication methods thereof Public/Granted day:2010-05-18
Information query
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