发明申请
US20070267942A1 PIEZOELECTRIC FILM RESONATOR, RADIO-FREQUENCY FILTER USING THEM, AND RADIO-FREQUENCY MODULE USING THEM
审中-公开
压电薄膜谐振器，使用它们的无线电频率滤波器和使用它们的无线电频率模块
- 专利标题： PIEZOELECTRIC FILM RESONATOR, RADIO-FREQUENCY FILTER USING THEM, AND RADIO-FREQUENCY MODULE USING THEM
- 专利标题（中）： 压电薄膜谐振器，使用它们的无线电频率滤波器和使用它们的无线电频率模块
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申请号： US11746955申请日： 2007-05-10
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公开(公告)号： US20070267942A1公开(公告)日： 2007-11-22
- 发明人: Hisanori MATSUMOTO , Atsushi ISOBE
- 申请人： Hisanori MATSUMOTO , Atsushi ISOBE
- 优先权： JP2006-139882 20060519
- 主分类号： H03H9/25
- IPC分类号： H03H9/25
摘要：
A piezoelectric film resonator for a radio-frequency circuit according to an aspect of the present invention includes a substrate and a multilayer film provided on the substrate. The multilayer film has a stacked structure in which at least two piezoelectric layers and at least three electrode layers disposed with each of the piezoelectric layers therebetween are stacked. At least one of the electrode layers is an electrode layer for excitation. The electrode layer for excitation has a structure in which a plurality of unit patterns as elements of the electrode layer for excitation are disposed periodically along a direction substantially perpendicular to a stacked direction of the stacked structure.