公开(公告)号：US20070267942A1

公开(公告)日：2007-11-22

申请号：US11746955

申请日：2007-05-10

申请人： Hisanori MATSUMOTO ,  Atsushi ISOBE

发明人： Hisanori MATSUMOTO ,  Atsushi ISOBE

IPC分类号： H03H9/25

CPC分类号： H03H9/02543 ,  H03H9/02228 ,  H03H9/02637 ,  H03H9/173 ,  H03H9/174 ,  H03H9/175 ,  H03H9/178

摘要： A piezoelectric film resonator for a radio-frequency circuit according to an aspect of the present invention includes a substrate and a multilayer film provided on the substrate. The multilayer film has a stacked structure in which at least two piezoelectric layers and at least three electrode layers disposed with each of the piezoelectric layers therebetween are stacked. At least one of the electrode layers is an electrode layer for excitation. The electrode layer for excitation has a structure in which a plurality of unit patterns as elements of the electrode layer for excitation are disposed periodically along a direction substantially perpendicular to a stacked direction of the stacked structure.

摘要翻译： 根据本发明的一个方面的用于射频电路的压电膜谐振器包括衬底和设置在衬底上的多层膜。 多层膜具有叠层结构，其中至少两个压电层和至少三个设置在它们之间的压电层之间的电极层被堆叠。 至少一个电极层是用于激发的电极层。 用于激发的电极层具有其中作为用于激发的电极层的元件的多个单元图案沿着与层叠结构的堆叠方向基本垂直的方向周期性地布置的结构。