发明申请
- 专利标题： BAKE PLATE HAVING ENGAGEABLE THERMAL MASS
- 专利标题（中）： 具有可焊接热质的烤盘
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申请号： US11849946申请日： 2007-09-04
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公开(公告)号： US20070295276A1公开(公告)日： 2007-12-27
- 发明人: David Quach , Tetsuya Ishikawa
- 申请人： David Quach , Tetsuya Ishikawa
- 申请人地址： JP Kyoto
- 专利权人： SOKUDO CO., LTD.
- 当前专利权人： SOKUDO CO., LTD.
- 当前专利权人地址： JP Kyoto
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
A bake station comprising a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position; and a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position.
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