Invention Application
US20080003150A1 METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
审中-公开
使用CDO室进行PFC排放的方法和装置
- Patent Title: METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
- Patent Title (中): 使用CDO室进行PFC排放的方法和装置
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Application No.: US11673548Application Date: 2007-02-09
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Publication No.: US20080003150A1Publication Date: 2008-01-03
- Inventor: Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- Applicant: Sebastien Raoux , Kuo-Chen Lin , Robbert Vermeulen , Daniel Clark , Stephen Tsu , Mehran Moalem , Allen Fox , Monique McIntosh , Joshua Putz , Eric Rieske , Poh Lee
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Main IPC: B01D53/00
- IPC: B01D53/00 ; G05B11/00
Abstract:
In certain aspects, a system is provided for abating perfluorocarbons (PFCs) from a gaseous waste stream that includes (1) a wet scrubber adapted to scrub a gaseous waste stream and having an outlet adapted to discharge a scrubbed gaseous waste stream; and (2) a controlled decomposition oxidation (CDO) system. The CDO system includes a CDO thermal reaction chamber that includes (a) an inlet coupled to the outlet of the wet scrubber; (b) a catalyst bed adapted to abate PFCs within the CDO thermal reaction chamber; and (c) an outlet. Numerous other aspects are provided.
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